Measuring substrate-independent modulus of thin films

Hay, Jennifer L.; Crawford, B.

doi:10.1557/jmr.2011.8

Cited by 188 publications

(134 citation statements)

References 14 publications

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“…Unfortunately, the form of this function differs according to the authors who employed it. Mencik et al [48], Hay and Crawford [53] and Sawa et al [49] confirmed the general form of Eq. (9) even if the parameter ξ has been associated to different expressions.…”

Section: Indentation On Thin Filmsmentioning

confidence: 82%

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An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

Hemmouche¹,

Chicot²,

Amrouche³

et al. 2013

Materials Science and Engineering: A

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. a b s t r a c tThe elastic modulus of thin films can be directly determined by instrumented indentation when the indenter penetration does not exceed a fraction of the film thickness, depending on the mechanical properties of both film and substrate. When it is not possible, application of models for separating the contribution of the substrate is necessary. In this work, the robustness of several models is analyzed in the case of the elastic modulus determination of a porous aluminium oxide film produced by anodization of an aluminium alloy. Instrumented indentation tests employing a Berkovich indenter were performed at a nanometric scale, which allowed a direct determination of the film elastic modulus, whose value was found to be approximately 11 GPa. However, at a micrometric scale the elastic modulus tends toward the value corresponding to the substrate, of approximately 73 GPa. The objective of the present work is to apply different models for testing their consistency over the complete set of indentation data obtained from both classical tests in microindentation and the continuous stiffness measurement mode in nanoindentation. This approach shows the continuity between the two scales of measurement thus allowing a better representation of the elastic modulus variation between two limits corresponding to the substrate and film elastic moduli. Gao's function proved to be the best to represent the elastic modulus variation.

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Section: Indentation On Thin Filmsmentioning

confidence: 82%

“…Gao's function has already been applied by numerous authors [48][49][50][51][52][53]. Unfortunately, the form of this function differs according to the authors who employed it.…”

Section: Indentation On Thin Filmsmentioning

confidence: 99%

An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

Hemmouche¹,

Chicot²,

Amrouche³

et al. 2013

Materials Science and Engineering: A

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show abstract

“…At least eight CSM-mode indentations were performed on each sample, and the hardness H and modulus E were calculated using the Oliver-Pharr method [35] by averaging over the depth range of 1000-1800 nm. The substrate effect on E was then corrected using the Hay method [36]. Because the 2 lm depth is less than 20% of NCC film thicknesses (>10 lm), the substrate effect on H is generally insignificant [37].…”

Section: Methodsmentioning

confidence: 99%

Reinforcing nanocolloidal crystals by tuning interparticle bonding via atomic layer deposition

Zhang

Lee

et al. 2015

Acta Materialia

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“…Finite element analysis suggests that indents into coatings on the more compliant silica substrates will have an additional substrate effect that would artificially reduce the extracted coating modulus by as much as 5% [29]. Comparing the moduli measured on silica to those measured on …”

Section: A Nanoindentationmentioning

confidence: 99%

Investigation of the Young's modulus and thermal expansion of amorphous titania-doped tantala films

Abernathy

2013

Optical Interference Coatings

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The current generation of advanced gravitational wave detectors utilize titania-doped tantala/silica multilayer stacks for their mirror coatings. The properties of the low-refractive-index silica are well known; however, in the absence of detailed direct measurements, the material parameters of Young's modulus and coefficient of thermal expansion (CTE) of the high refractive index material, titania-doped tantala, have been assumed to be equal to values measured for pure tantala coatings. In order to ascertain the true values necessary for thermal noise calculations, we have undertaken measurements of Young's modulus and CTE through the use of nanoindentation and thermal-bending measurements. The measurements were designed to assess the effects of titania-doping concentration and postdeposition heat-treatment on the measured values in order to evaluate the possibility of optimizing material parameters to further improve thermal noise in the detector. Young's modulus measurements on pure tantala and 25% and 55% titania-doped tantala show a wide range of values, from 132 to 177 GPa, which are dependent on both titania concentration and heat-treatment. Measurements of CTE give values of 3.9 0.1 × 10 −6 K −1 and 4.9 0.3 × 10 −6 K −1 for 25% and 55% titania-doped tantala, respectively, without dependence on post-deposition heat-treatment.

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Measuring substrate-independent modulus of thin films

Abstract: Abstract

Cited by 188 publications

References 14 publications

An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

Reinforcing nanocolloidal crystals by tuning interparticle bonding via atomic layer deposition

Investigation of the Young's modulus and thermal expansion of amorphous titania-doped tantala films

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