Measuring technique of a phase shift based on Fourier analysis of differential interferograms

Vishnyakov, G. N.; Левин, Г. Г.; Minaev, V. L.

doi:10.1134/s0030400x15060247

Cited by 2 publications

(1 citation statement)

References 17 publications

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“…In order to resolve this problem, Vishnyakov and Levin, et al, proposed a method to first do subtraction between two interferograms and then perform the Fourier Transform. This can effectively avoid the spectral aliasing and preserve relatively high calculation precision even when the carrier frequency is low [17,18]. However, under this method, three interferograms are required for calculation, which limits its applicability.…”

Section: Introductionmentioning

confidence: 99%

Advanced method of global phase shift estimation from two linear carrier interferograms

Sun

Wang

Zhao

et al. 2018

J. Eur. Opt. Soc.-Rapid Publ.

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Background: Phase-shifting interferometry is a kind of important technique used in optical interference metrology. This technique has high precision and good stability, which has been widely used in scientific research and industrial production. Methods: This paper proposes a new method to estimate global phase shift from two interferograms. This method performs algebraic calculation of two interferograms with the assistance of Hilbert transform. An iterative approach is used for the attempted phase to ensure that the minimum of assessment function is obtained. Results: The simulated result indicate that the maximum calculation error of the global phase-shifting is 1.5%. And then we use experimental data to verify the performance of this method. Conclusions: The method proposed in this article is simple but precise, and can cope with interferograms with uneven background and modulation, non-periodic apodization, and random noises. It does not require any specific carrier frequency of the measured interferogram or any adjustment of range of integration in accordance with the carrier frequency.

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Section: Introductionmentioning

confidence: 99%