Measuring the pumping speed of rough vacuum pumps: conventional stationary method vs intermittent pump-down method (new standard DIN 28432)

Jitschin, W.; Bernhardt, Karl-Heinz; Lachenmann, R.; Bickert, P; Eckle, F.J.

doi:10.1016/0042-207x(96)00009-7

Cited by 4 publications

(1 citation statement)

References 2 publications

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“…It is already identified that these exponential decay characteristic is directly relevant to the pumping speed. [5,6] the pump performance measuring methods using exponential decaying characteristics has been proposed in [7,8] In this study, each exponential decaying characteristic is suggested as an indicator of the pumping speed. This pumping speed indicator method is applied to the data obtained in the field and verified that is suitable for the vacuum pump status diagnosis II.…”

Section: Introductionmentioning

confidence: 99%

Vacuum Pump System Diagnosis with the Pumping Speed Indicator

Lee¹,

Kim²

2015

Proceedings of the 2015 International Conference on Electrical, Automation and Mechanical Engineering

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Abstract-The diagnosis of a vacuum pump system for the semiconductor manufacturing is directly related to the failure rate of wafer. Pumping speed is the volume flow rate per unit time by the vacuum pump and represents the performance of vacuum pump directly. Unfortunately, it is impossible to measure the pumping speed in situation. We proposed an alternative method to infer pumping speed indirectly in situ. The Pumping speed indicator (PSI) is based on similarity of the pump-down method and the semiconductor manufacturing processes, estimates the exhaust capacity of vacuum pump.

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Section: Introductionmentioning

confidence: 99%