Measuring the roughness of high-precision quartz substrates and laser mirrors by angle-resolved scattering

Azarova, Valentina; Dmitriev, V. G.; Lokhov, Yu. N.; Malitskii, K N

doi:10.1364/jot.69.000125

Cited by 13 publications

(6 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Similar information, although with a much worse lateral reso lution, can be obtained using a white light interferometer. The comparison of the recorded relief with the results, obtained using the methods, based on the analysis of angular distribu tions of the Xray and optical scattered radiation intensity [37,38], confirmed the correctness of the analysis of the sur face scattering properties based on its AFM scanning. The results of experiments and vector theory of laser radiation scattering with the precision dielectric surface [36 - 41] show that to achieve the required level of backscattering one should polish the substrate, on which the multilayer interference coating is deposited, till the residual mean square roughness no greater than 0.2 nm within the spatial frequency range 0.07 - 3 mm -1 .…”

Section: Backscattering Of Laser Radiation In a Ring Cavity And The Csupporting

confidence: 66%

Precise laser gyroscope for autonomous inertial navigation

Kuznetsov¹,

Molchanov²,

Chirkin³

et al. 2015

Quantum Electron.

View full text Add to dashboard Cite

Requirements to gyroscopes of strapdown inertial navigation systems for aircraft application are formulated. The construction of a ring helium -neon laser designed for autonomous navigation is described. The processes that determine the laser service life and the relation between the random error of the angular velocity measurement and the surface relief features of the cavity mirrors are analysed. The results of modelling one of the promising approaches to processing the laser gyroscope signals are presented.

show abstract

Section: Backscattering Of Laser Radiation In a Ring Cavity And The Csupporting

confidence: 66%

Precise laser gyroscope for autonomous inertial navigation

Kuznetsov¹,

Molchanov²,

Chirkin³

et al. 2015

Quantum Electron.

View full text Add to dashboard Cite

show abstract

“…First, the height distributions are determined according to a Gaussian distribution of mean value zero and root mean square σ = 6 Å. This is a typical value for a high quality polished quartz plate [30]. The heights are stored in a grid {x, y} of length L × L containing 2 n × 2 n nodes.…”

Section: Numerical Ingredients and Input Parametersmentioning

confidence: 99%

“…where the cut-off spatial frequency K min has been introduced to account for the surface profile property < h >= 0 ⇒ P SD2(0) = 0 [32]. The correlation length l is of the order of [30] 1µm and K min is smaller than 10 −3 µm −1 [14]. The parameter 1/K min acts as a spatial frequency threshold for the laser radius: roughly speaking, for w 0 > √ 2/K min the Gaussian beam behaves as a plane-wave and the specular-scattered interference term vanishes.…”

Section: Numerical Ingredients and Input Parametersmentioning

confidence: 99%

Surface roughness effects on the transmission of Gaussian beams by anisotropic parallel plates

Zomer

2003

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

Influence of the plate surfaces roughness in precise ellipsometry experiments is studied. The realistic case of a Gaussian laser beam crossing a uniaxial platelet is considered. Expression for the transmittance is determined using the first order perturbation theory. In this frame, it is shown that interference takes place between the specular transmitted beam and the scattered field. This effect is due to the angular distribution of the Gaussian beam and is of first order in the roughness over wavelength ratio. As an application, a numerical simulation of the effects of quartz roughness surfaces at normal incidence is provided. The interference term is found to be strongly connected to the random nature of the surface roughness.

show abstract

“…1) Angle-resolved scattering (ARS) and total integrated scattering (TIS) measurements have been used to characterize surface roughness. [2][3][4][5][6][7][8][9][10][11][12] The scattering measurement is useful for the measurement of surface roughness similarly to atomic force microscopy. Optical schemes have the advantages that they are noncontact, nondestructive, and rapid methods capable of sampling large areas.…”

Section: Introductionmentioning

confidence: 99%