“…WC creates β-W 2 C [7,24] and β-WC 1-x [7,24,29] phases where the individual forms of C and WC have different indentation of hardness (H), indentation modulus (E) and COF. Various factors which influence the formation of both phases are as follows: the deposited substrate surface temperature [3,8,11,12,23]; applied pressure and bias voltage [4,24,27,28]; content of carbon in the layers [1,6,8,23]; the flow rate and composition of the precursor [3,4,6,29], and residual stress in the layers [26]. Monocrystalline Si substrate is used to test structural properties under laboratory conditions [27][28][29][30].…”