2007
DOI: 10.1117/12.758816
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Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

Abstract: This paper reports the mechanical design and optimization of tunable Fabry-Perot (FP) filter structures for the development of MEMS adaptive infrared detectors using finite element modeling and experimental investigations. The results indicate that the mechanical characteristics of the FP filters are significantly influenced by the structural designs, which eventually affect the filter performance and device integrity.

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