Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas

Abstract

The mechanical characteristics of iron-containing nanosprings (Fe-containing nanosprings) fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) using a ferrocene (C10H10Fe) source gas were investigated. The shear and Young's moduli were 34 and 92 GPa, respectively. We also evaluated the annealing effect of Fe-containing nanosprings and observed a droplet containing Fe and Ga on the nanospring after annealing at 600 °C. The spring constant rapidly decreased after annealing at 600 °C. By scanning electron microscopy energy–dispersive X-ray spectroscopy (SEM–EDX) and transmission electron microscopy energy–dispersive X-ray spectroscopy (TEM–EDX) line analysis, it was confirmed that the decrease in the spring constant was due to Ga removal.

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

“…This highlights again that the carbon matrix is contributing largely to the mechanical behavior and reached about 300 GPa, which is typical for core carbon material; see Figure 11. Similar arguments apply for the Fe-FIBID of Nakai et al [59], where the iron content is far below percolation. Their elastic modulus of around 90 GPa falls into the lower range of measured FIBID material elastic moduli; compare to Figure 11.…”

“…(g) FIB grown helix with W(CO) 6 and C 14 H 10 for tensile strain experiments, modified from Nakamatsu et al [43]. (h) Tensile strain experiment with Fe-C FIB helix fixed between a cantilever and substrate, modified from Nakai et al [59]. (i) FIB W-C horizontal rod three-point bending experiments, modified from Córdoba et al [51].…”

“…It shows the high capability of 3D control for the FIBID process at the nanometer scale as well as the challenges involved in obtaining such structures in an ideal shape for the mechanical measurements. The actual tensile strain experiment is shown in Figure 13h with an Fe-C FIB helix fixed between a cantilever and substrate from Nakai et al [59]. Córdoba et al [51] succeeded in growing a horizontal rod from W(CO) 6 along two pre-etched silicon pillars for three-point bending experiments; see Figure 13h.…”

3D superconducting hollow nanowires with tailored diameters grown by focused He+ beam direct writing

“…A very promising development of FIBID is based on Ga + ions. Functional 3D nanomaterials have been grown by Ga + FIBID in the last decade [21][22][23][24][25][26]. In particular, Ga + FIBID in combination with W(CO) 6 as precursor material yielded 3D superconducting W-based wires with a critical temperature (T c ) below 5 K and a critical magnetic field (µ 0 H c2 (0)) up to 9.5 T [14][15][16].…”

Young's Modulus Measurement of Submicron-thick Aluminum Films Using Fan-shaped Silicon Resonators

“…Submicron-thick films made of a variety of materials, such as metals, alloys, polymers, and ceramics, are commonly used in semiconductor devices and micro/nano-electromechanical systems (MEMS/NEMS). (1) Almost all of the films play some kind of functional roles, for example, surface passivation, diffusion barrier, wiring, and base structure. One important thing impossible to overlook is that these functional films are part of the structural components of a device.…”