2021 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP) 2021
DOI: 10.1109/dtip54218.2021.9568677
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Mechanical characterization of bulk-micromachined Ti membranes by microbending and by vibrometry

G. Becan
1
,
Alain Bosseboeuf
2
,
J. Phung
3
et al.
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