Mechanical dissipation in tetrahedral amorphous carbon

Czaplewski, David A.; Sullivan, John P.; Friedmann, Thomas A.; Carr, Dustin W.; Keeler, Bianca E. N.; Wendt, Joel R.

doi:10.1063/1.1821638

Cited by 32 publications

(8 citation statements)

References 29 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…9,10 In this technique, a substrate containing micrometer sized cantilever beams is attached to a piezoelectric actuator and a laser beam is reflected over its surface. The reflected laser signal is directed into a photodetector, which converts the oscillating light signal into a voltage signal.…”

Section: Young's Modulus Of Vo 2 Thin Films As a Function Of Temperatmentioning

confidence: 99%

Young’s modulus of VO2 thin films as a function of temperature including insulator-to-metal transition regime

Sepúlveda

Rúa

Cabrera

et al. 2008

Applied Physics Letters

View full text Add to dashboard Cite

Young’s modulus of VO2 thin films has been measured for the first time through the material’s insulator-to-metal transition. The resonant frequency of silicon VO2 coated cantilevers was measured in the temperature range 30–90°C. It has been found that during the semiconductor to metallic transition of VO2 thin films, which occurs at a temperature of 68°C, Young’s modulus changes most dramatically with temperature, abruptly reversing its declining trend with increasing temperature. The film is stiffened through the transition and, as the temperature is further raised, the declining trend is reasserted at a similar rate.

show abstract

Section: Young's Modulus Of Vo 2 Thin Films As a Function Of Temperatmentioning

confidence: 99%

Young’s modulus of VO2 thin films as a function of temperature including insulator-to-metal transition regime

Sepúlveda

Rúa

Cabrera

et al. 2008

Applied Physics Letters

View full text Add to dashboard Cite

show abstract

“…These include internal friction mechanisms such as thermoelastic damping ͑TED͒ which is associated with thermal losses generated by the stretching and compression of the material during oscillation. The quality factor of a resonator limited by TED is given by 35,36 …”

Section: Introductionmentioning

confidence: 99%

Resonant characteristics of ultranarrow SiCN nanomechanical resonators

Guthy

Das

Drobot

et al. 2010

Journal of Applied Physics

View full text Add to dashboard Cite

We report the machining of doubly-clamped SiCN nanomechanical resonators as narrow as 16 nm and lengths of up to 10 μm with a yield approaching 100%. The resonators were actuated using a piezoelectric disk, and their resonant response was detected using optical interferometry. Resonators with widths ranging from 16 to 375 nm and lengths from 10 to 50 μm were analyzed at room temperature at pressures ranging from 10 to 50 mTorr. Resonant frequencies in the 4–15 MHz range and quality factors in the 1000–7000 range were measured. We observed a significant decrease in resonant frequency with decreasing resonator width. The results of finite element analysis (FEA) show that this width dependence is mainly due to the resonators vibrating in the horizontal rather than vertical direction. At widths below 50 nm the comparison of experimental and FEA data suggest a gradual tensile stress reduction in the resonators as their width is reduced. Material softening is the most likely cause of this stress reduction. Additionally, the resonant behavior of 16, 55, and 375 nm wide devices was studied as a function of ambient pressure in the 10−5–10 Torr range. Resonance quality becomes dominated by gas damping effects at pressures above a threshold determined by the intrinsic Q-factor of the resonator. The intrinsic Q-factor tended to decrease with decreasing resonator width but was independent of length or resonant frequency. This suggests that surface-related mechanisms dominate the dissipation of energy in these devices.

show abstract

“…In electromechanical resonators, energy dissipation can occur through a wide variety of mechanisms. 9 Among these mechanisms are intrinsic processes such as thermoelastic dissipation (TED), 10 dissipation due to electron-phonon interactions, 11 and dissipation due to phonon-phonon interactions. 12 These mechanisms are inherent in any material and thus are omnipresent in any functional device.…”

Section: Introductionmentioning

confidence: 99%

Observation of nonclassical scaling laws in the quality factors of cantilevered carbon nanotube resonators

Vallabhaneni¹,

Rhoads²,

Murthy³

et al. 2011

Journal of Applied Physics

View full text Add to dashboard Cite

This work examines the quality factors (Q factors) of resonance associated with the axial and transverse vibrations of single-wall carbon nanotube (SWCNT) resonators through the use of molecular dynamics (MD) simulation. Specifically, the work investigates the effect of device length, diameter, and chirality, as well as temperature, on the resonant frequency and quality factor of these devices and benchmarks the results of MD simulations against classical theories of energy dissipation. The quality factor (Q) associated with transverse vibration is found to increase with increasing device length (Q $ L h , where 0.8 < h < 1.4) and decrease with increasing device diameter (Q $ D Àl , where 1.4 < l < 1.6), while the Q associated with axial vibration is almost independent of length and diameter. We show that to accurately predict temperature dependence of Q, the external and internal energies need to be properly decomposed, and temperature quantum correction should be performed. For both vibrational modes, Q shows a temperature dependence Q $ T Àa , where a > 1 when below Debye temperature due to quantum effects, and Q gradually recovers the classical T À1 dependence when above Debye temperature. Our temperature dependence is in contrast to prior studies that suggested Q $ T Àb , where 0 < b < 1. The observed size and temperature dependencies by us have many deviations from existing classical theories of energy dissipation, possibly due to phonon confinement effects in these nanostructures and temperature quantum effects. V

show abstract

Mechanical dissipation in tetrahedral amorphous carbon

Cited by 32 publications

References 29 publications

Young’s modulus of VO2 thin films as a function of temperature including insulator-to-metal transition regime

Young’s modulus of VO2 thin films as a function of temperature including insulator-to-metal transition regime

Resonant characteristics of ultranarrow SiCN nanomechanical resonators

Observation of nonclassical scaling laws in the quality factors of cantilevered carbon nanotube resonators

Contact Info

Product

Resources

About