Mechanical Microsensors

Elwenspoek, M.; Wiegerink, Remco J.

doi:10.1007/978-3-662-04321-9

Cited by 250 publications

(202 citation statements)

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“…It defines the bandwidth of the resonator relatively to its central resonant frequency or equivalently it expresses the maximum amplitude of the bending structure taking into account the different damping sources (Elwenspoek & Wiegerink, 2001, Beeby et al, 2004. High quality factors involve better device performance, better resolution and improved insensitivity to the disturbances (Beeby et al, 2004).…”

Section: Resonant Magnetic Sensorsmentioning

confidence: 99%

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Todaro¹,

Sileo²,

Vittorio³

2012

Magnetic Sensors - Principles and Applications

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Section: Resonant Magnetic Sensorsmentioning

confidence: 99%

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Todaro¹,

Sileo²,

Vittorio³

2012

Magnetic Sensors - Principles and Applications

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“…The wire is heated by an electrical current and the voltage drop over the wire is measured (cf. Figure 8(b)) [14][15][16]. When there is a flow through the channel, the wire is cooled, and, that way, its electrical resistance is decreased.…”

Section: Combination With Wiresmentioning

confidence: 99%

Ultrasonic Hot Embossing

2011

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“…Commonly, this means the hybrid integration of the MEMS part and the sensing electronics (e.g. CMOS), which is sometimes simpler and economically more feasible [12].…”

Section: Long-range Position Sensing and Control In Mems Applicationsmentioning

confidence: 99%

A micromachined capacitive incremental position sensor: part 1. Analysis and simulations

Kuijpers

Krijnen

Wiegerink

et al. 2006

J. Micromech. Microeng.

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Part 1 of this two-part paper describes the analysis and 2D finite element (FE) simulations for a capacitive incremental position sensor for nanopositioning of microactuator systems with a displacement range of 100 µm or more. Two related concepts for a capacitive incremental position sensor are presented. In an incremental capacitance measurement mode (ICMM), the periodic change in capacitance is measured to determine the relative displacement between two periodic geometries S1 and S2 with a gap distance of ∼1 µm. In a constant capacitance measurement mode (CCMM), the distance between S1 and S2 is controlled to keep the capacitance between S1 and S2 constant. Analysis and 2D finite element simulations show that the signal-to-noise ratio for CCMM can be >300× over ICMM and with less nonlinearity of the position sensor signal. This means that CCMM will perform better in accurate quadrature incremental position detection. A comparison with measurements shows that the 2D finite element simulation method is a useful tool that realistically predicts the capacitance versus displacement for different combinations of periodic geometries.

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Mechanical Microsensors

Cited by 250 publications

References 0 publications

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Ultrasonic Hot Embossing

A micromachined capacitive incremental position sensor: part 1. Analysis and simulations

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