2014
DOI: 10.1016/j.apsusc.2014.03.099
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Mechanical properties and thermal stability of TiAlN/Ta multilayer film deposited by ion beam assisted deposition

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Cited by 24 publications
(9 citation statements)
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“…The use of Ta is also being recently researched, as shown in the work presented in Section 1 [27], where various multilayered TiAlTaN-(TiAlN/TaN) with differing layer thicknesses were tested and subsequently characterized. In another recent study carried out by Shang et al [93], the mechanical properties of a multilayered TiAlN/Ta coating are evaluated. The coating consists of three layers, a TiAl layer followed by a TiAlN layer and finally, a Ta layer (Figure 26).…”
Section: Multilayered Tialn-based Coatingsmentioning
confidence: 99%
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“…The use of Ta is also being recently researched, as shown in the work presented in Section 1 [27], where various multilayered TiAlTaN-(TiAlN/TaN) with differing layer thicknesses were tested and subsequently characterized. In another recent study carried out by Shang et al [93], the mechanical properties of a multilayered TiAlN/Ta coating are evaluated. The coating consists of three layers, a TiAl layer followed by a TiAlN layer and finally, a Ta layer (Figure 26).…”
Section: Multilayered Tialn-based Coatingsmentioning
confidence: 99%
“…Furthermore, this element confers the coating with a better thermal stability. Studies such as these [27,93] show that Ta is very beneficial to improve TiAlN-based coating's wear behavior. It is known that multilayered coatings benefit from all the properties of their layers, as seen in the previous study [93], where a Ta layer promoted a lower wear rate for the coating, based on its ductility (primarily).…”
Section: Multilayered Tialn-based Coatingsmentioning
confidence: 99%
“…The presence of aluminum in the coatings of this type brings about the situation where the service-life temperature of these coatings exceeds 970 K, and in such operating conditions of raised temperature, a layer of Al 2 O 3 is formed on the surface, which forms a diffusive barrier for the atmospheric oxygen. 13,14 Zinc oxide is a semiconductor characterized by a high energy gap (3.4 eV), high exciton binding energy (60 meV) and easy n-type doping. 15,16 Zinc oxide, ZnO, obtained with the use of the ALD technique on a sialonceramic substrate enables the polarization of this substrate during the technological process of PVD and, hence, the objective of this paper is to investigate the impact of the ZnO layer obtained with the use of the ALD technique on the adhesion of the hybrid coating ALD/PVD of the ZnO/(Ti,Al)N type to the sialon substrate.…”
Section: Introductionmentioning
confidence: 99%
“…It was demonstrated from the GDOES analysis that in the contact zone, from the surface of the coatings, there is a rise in the concentration of the elements that are components of the substrate, with a simultaneous decrease of the concentration of those elements which are components of the coating. As suggested by the authors of earlier works [15][16][17][18][19][20][21][22][23][24][25], this may be due to the presence of a transit zone of a diffusive character between the substrate material and the coating, although we cannot rule out the possibility of simultaneous non-homogeneous evaporation of the material from the surface of the samples during the glow discharge spectrometer tests.…”
Section: Resultsmentioning
confidence: 80%
“…The rapid development of PVD technology started in the eighties, associated with a wide use of refractory compounds of carbon, nitrogen and boron, in particular with transition metals, as deposition of a thin, hard, anti-wear coating is one of the most important ways to reduce tool wear. Reducing the wear rate and increasing the durability, a low coefficient of thermal conductivity and wear on the effects of high temperature, and in many cases reducing the oxidation and corrosion processes largely determines the use of coatings obtained in the PVD process and, in some cases, the CVD process for coating of tool materials [11][12][13][14][15][16][17][18][19][20][21][22][23][24][25].…”
Section: Introductionmentioning
confidence: 99%