Mechanical properties and thermal stability of reactively sputtered multi-principal-metal Hf-Ta-Ti-V-Zr nitrides

Kirnbauer, A.; Kretschmer, A.; Koller, Christian; Wójcik, Tomasz; Paneta, V.; Hans, Marcus; Schneider, Jochen M.; Polcik, P.; Mayrhofer, P.H.

doi:10.1016/j.surfcoat.2020.125674

Cited by 80 publications

(31 citation statements)

References 57 publications

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“…One common class of methods is physical vapour deposition, such as thermal or electron beam evaporation, cathodic arc deposition, ion-plating, ion beam sputtering, pulsed laser deposition and various types of sputtering processes. Among these, the physical vapor deposition techniques including magnetron sputtering [66][67][68][69] , and cathodic arc deposition [39,70] are utilized for the fabrication of multicomponent nitride films. Chemical vapor deposition (CVD) is another versatile technique to deposit high-quality films by gas chemical reaction with each other.…”

Section: Thin Film Deposition and Growthmentioning

confidence: 99%

Nonstoichiometric Multicomponent Nitride Thin Films

Shu

2020

Linköping Studies in Science and Technology. Licentiate Thesis

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High entropy ceramics have rapidly developed as a class of materials based on high entropy alloys; the latter being materials that contain five or more elements in near-equal proportions. Their unconventional compositions and chemical structures hold promise for achieving unprecedented combinations of mechanical, electrical and chemical properties. In this thesis, high entropy ceramic films, (TiNbZrTa)Nx were deposited using reactive magnetron sputtering with segmented targets. The stoichiometry x was tuned with two deposition parameters, i.e., substrate temperature and nitrogen flow ratio fN, their effect on microstructure and mechanical, electric, and electrochemical properties were investigated.

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Section: Thin Film Deposition and Growthmentioning

confidence: 99%

Nonstoichiometric Multicomponent Nitride Thin Films

Shu

2020

Linköping Studies in Science and Technology. Licentiate Thesis

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“…Crystalline (Hf,Ta,Ti,V,Zr)N nitride thin films, with a high-entropy metal-sublattice, were synthesized at 440 • C by reactive magnetron sputtering using an equimolar Hf-Ta-Ti-V-Zr-compound target [58]. These coatings consisted of fcc mono-nitride.…”

Section: Gb Wetting Phenomena In Heas Containing Nitridesmentioning

confidence: 99%

“…These coatings consisted of fcc mono-nitride. The atom probe tomography (APT) indicated the homogenous distribution of all elements in the fcc mono-nitride (Hf,Ta,Ti,V,Zr)N, even after annealing in vacuum at 1300 • C (see Figure 9a in [58]). However, after annealing at 1500 • C, a loss of nitrogen took place, and hexagonal nitride (Ta,V) 2 N formed.…”

Section: Gb Wetting Phenomena In Heas Containing Nitridesmentioning

confidence: 99%

“…However, after annealing at 1500 • C, a loss of nitrogen took place, and hexagonal nitride (Ta,V) 2 N formed. The very thin layers of this hexagonal (Ta,V) 2 N are located most probably in the GBs of mono-nitride (see Figure 9c in [58]). This can be an indication that, at 1500 • C, the sample is between the bulk solvus and the GB solvus (shown in Figure 1 by red dotted line) and contains thin layers of the GB phase.…”

Section: Gb Wetting Phenomena In Heas Containing Nitridesmentioning

confidence: 99%

See 1 more Smart Citation

Grain Boundary Wetting Phenomena in High Entropy Alloys Containing Nitrides, Carbides, Borides, Silicides, and Hydrogen: A Review

et al. 2021

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In this review, we analyze the structure of multicomponent alloys without principal components (they are also called high entropy alloys—HEAs), containing not only metals but also hydrogen, nitrogen, carbon, boron, or silicon. In particular, we discuss the phenomenon of grain boundary (GB) wetting by the melt or solid phase. The GB wetting can be complete or incomplete (partial). In the former case, the grains of the matrix are completely separated by the continuous layer of the second phase (solid or liquid). In the latter case of partial GB wetting, the second solid phase forms, between the matrix grains, a chain of (usually lenticular) precipitates or droplets with a non-zero value of the contact angle. To deal with the morphology of GBs, the new GB tie-lines are used, which can be constructed in the two- or multiphase areas of the multidimensional HEAs phase diagrams. The GBs in HEAs in the case of complete or partial wetting can also contain hydrides, nitrides, carbides, borides, or silicides. Thus, GB wetting by the hydrides, nitrides, carbides, borides, or silicides can be used in the so-called grain boundary chemical engineering in order to improve the properties of respective HEAs.

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“…In the last five years, the research on the ceramic counterparts to HEAs, high-entropy ceramics (HECs), has seen an exponential growth. Specifically, various highentropy oxides (including rocksalt [4], pervoskite [5], fluorite [6], pyrochlore [7], and spinel [8] oxides), borides [9][10][11], silicides [12], carbides [13][14][15][16], nitrides [17,18], and fluorides [19] have been successfully fabricated. Single-phase high-entropy aluminides (intermetallic compounds) [20] have also been made, thereby bridging HEAs and HECs.…”

Section: Introductionmentioning

confidence: 99%