Mechanical properties, bonding characteristics, and thermal stability of magnetron-sputtered HfN  films

Ke, Yi-En; Chen, Yung-I

doi:10.1016/j.surfcoat.2020.125575

Cited by 7 publications

(4 citation statements)

References 35 publications

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“…Alternatively, Meng et al, [27] reported the phase transformation from ZrN to c-Zr 3 N 4 under high-compressive stress by increasing the substrate bias voltage in direct current magnetron sputtering (DCMS). In a previous study [29], HfN x films with stoichiometric variable x in the range of 0.81-2.07 were deposited through DCMS using nitrogen flow ratios of 0.1 to 1.0. The structure varied from a δ-HfN phase to a near-amorphous structure as the stoichiometric variable x increased, which was accompanied by a change in the bonding characteristics from HfN to Hf 3 N 4 -dominant and a decrease in mechanical properties.…”

Section: Introductionmentioning

confidence: 99%

Effects of Nitrogen Flow Ratio on Structures, Bonding Characteristics, and Mechanical Properties of ZrNx Films

Chen

2020

Coatings

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ZrNx (x = 0.67–1.38) films were fabricated through direct current magnetron sputtering by a varying nitrogen flow ratio [N2/(Ar + N2)] ranging from 0.4 to 1.0. The structural variation, bonding characteristics, and mechanical properties of the ZrNx films were investigated. The results indicated that the structure of the films prepared using a nitrogen flow ratio of 0.4 exhibited a crystalline cubic ZrN phase. The phase gradually changed to a mixture of crystalline ZrN and orthorhombic Zr3N4 followed by a Zr3N4 dominant phase as the N2 flow ratio increased up to >0.5 and >0.85, respectively. The bonding characteristics of the ZrNx films comprising Zr–N bonds of ZrN and Zr3N4 compounds were examined by X-ray photoelectron spectroscopy and were well correlated with the structural variation. With the formation of orthorhombic Zr3N4, the nanoindentation hardness and Young’s modulus levels of the ZrNx (x = 0.92–1.38) films exhibited insignificant variations ranging from 18.3 to 19.0 GPa and from 210 to 234 GPa, respectively.

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Section: Introductionmentioning

confidence: 99%

Effects of Nitrogen Flow Ratio on Structures, Bonding Characteristics, and Mechanical Properties of ZrNx Films

Chen

2020

Coatings

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“…Among surface engineering technologies, the protective coating of transition metal nitride (TMN) is one of the major research topics due to its outstanding properties, such as chemical inertness, hightemperature stability, hardness, and well wear resistance [1,2]. In recent years, binary TMN coatings of TiN [3], CrN [4], ZrN [5], NbN [6], MoN [7], HfN [8], and TaN [9] that have distinguished protective characteristics were intensively developed. To prolong the lifetime of these hard coatings and enhance their mechanical characteristics are essential to the development of nitride coatings, adding a second element to form a ternary TMN coating for further performance improvement is frequently proposed.…”

Section: Introductionmentioning

confidence: 99%

“…Meanwhile, the HfN film is featured with good adhesion, corrosion resistance, and high refractoriness [8,10,22,23]. The cubic and hexagonal structure features for MoN are analyzed by Hart and Koutná [24,25].…”

Section: Introductionmentioning

confidence: 99%

“…In the literature, the refractory metal nitride (RMN) films are limited. Yet, several papers concerning RMNs in binary, ternary, and even multielement forms are mentioned [8][9][10]21,24,25,32]. For example, Tsai et al reports that for the (TiVCrZrHf)N coating systems, sluggish diffusion hinders grain formation and leads to an amorphous initial layer and fine grain structure in the later stage of deposition.…”

Section: Introductionmentioning

confidence: 99%

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Microstructure and Mechanical Properties of Co-Sputtering (Mo, Hf)N Coatings

Hsu

2022

Coatings

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This work focused on the microstructure and mechanical properties of (Mo, Hf)N coatings deposited by radio frequency reactive magnetron co-sputtering technique with input power modulation. The coating characteristics, including indentation hardness, modulus, and tribological behavior, were discussed in terms of deposition parameter, composition, phase, and microstructure. The (Mo, Hf)N thin films were fabricated at a fixed Ar/N2 inlet gas ratio of 12/8 sccm/sccm and modulated input powers. The input power of Mo was fixed at 150 W, while that of the Hf target was managed from 25 to 200 W. The deposition rate and the Hf content of the (Mo, Hf)N coatings increased with input power. The (Mo, Hf)N ternary nitride coatings showed a polycrystalline microstructure with B1-MoN(111), β-Mo2N (112), γ-Mo2N(111), (200), and MoN2(200) phases in X-ray diffraction patterns as input power modulation were 150/25 to 150/100 W/W. The multiple phase microstructure feature and detail crystal development were demonstrated through transmission electron microscopy. According to nanoindentation and wear test results, ternary (Mo, Hf)N coatings represented more improved mechanical characteristics than the MoN and HfN binary nitride films. The 150/100 W/W deposited (Mo, Hf)N coating exhibited a highest hardness of 22.5 GPa when Hf content was at 5.6 at.%. The superior anti-wear behavior of this film with least wear damage was observed as well. The multiphase and solid-solution strengthening of the (Mo, Hf)N coatings, i.e., a microstructure feature of mixed B1-MoN, β-Mo2N, γ-Mo2N, and MoN2 phases and Hf doping in MoN, were the responsible for the superior mechanical and tribological behavior for the (Mo, Hf)N coatings.

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Plasmonic group IVB transition metal nitrides: Fabrication methods and applications in biosensing, photovoltaics and photocatalysis

Günaydın,

Çetinkaya,

Torabfam

et al. 2024

Advances in Colloid and Interface Science

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Mechanical properties, bonding characteristics, and thermal stability of magnetron-sputtered HfN films

Cited by 7 publications

References 35 publications

Effects of Nitrogen Flow Ratio on Structures, Bonding Characteristics, and Mechanical Properties of ZrNx Films

Effects of Nitrogen Flow Ratio on Structures, Bonding Characteristics, and Mechanical Properties of ZrNx Films

Microstructure and Mechanical Properties of Co-Sputtering (Mo, Hf)N Coatings

Plasmonic group IVB transition metal nitrides: Fabrication methods and applications in biosensing, photovoltaics and photocatalysis

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