2004
DOI: 10.1016/j.vacuum.2004.07.065
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Mechanical properties of a-C:H thin films deposited by r.f. PECVD method

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Cited by 6 publications
(2 citation statements)
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“…It contains tetrahedral diamond-like sp 3 , trigonal graphite-like sp 2 and even sometimes linear sp 1 phases of carbon in its structure [1]. Because of both diamond and graphite like character, a-C:H exhibits unique electrical, optical, and tribological properties suitable for applications such as cutting tools, magnetic storage media and field emission devices [2][3][4][5][6][7][8][9]. Homo (a-C:H/a-C:H) and hetro (C-Si/a-C:H) junction solar cells and antireflection coatings on crystalline silicon solar cells are some of its recent applications realized [10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…It contains tetrahedral diamond-like sp 3 , trigonal graphite-like sp 2 and even sometimes linear sp 1 phases of carbon in its structure [1]. Because of both diamond and graphite like character, a-C:H exhibits unique electrical, optical, and tribological properties suitable for applications such as cutting tools, magnetic storage media and field emission devices [2][3][4][5][6][7][8][9]. Homo (a-C:H/a-C:H) and hetro (C-Si/a-C:H) junction solar cells and antireflection coatings on crystalline silicon solar cells are some of its recent applications realized [10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…In addition to its use in measuring polymers, TIR Raman spectroscopy has been used to follow absorption kinetics, [84][85][86][87] and characterize interfaces [87][88][89][90][91] and surfaces. [92][93][94] The theory of Raman scattering generated with evanescent wave excitation has been shown for an array of excitation and collection geometries by D'Hooge et. al., and the reader can look to these articles for a more detailed description.…”
Section: = [( ) − ] − ( )mentioning
confidence: 99%