Mechanical properties of elementary layers involved in a multilayer optical stack by photon-acoustic phonon interaction approaches

Faëse, Frédéric; Cherroret, Delphine Poinot; Châtel, Sébastien; Becerra, L.; Challali, Fatiha; Djémia, Philippe; Belliard, Laurent

doi:10.1063/1.5030749

Cited by 3 publications

(2 citation statements)

References 28 publications

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“…In several cases, for film thicknesses below $100 nm, resolution of single echos turns out to be difficult, or impossible [60][61][62]. However, by a detailed analysis of the reflectivity signal, and taking into account features like the Brillouin oscillations, it has been possible to measure Pt and Fe films of thickness down to 5 nm, deposited on Si or on borosilicate glass substrates [60], and a buried TaN layer of thickness of 20 nm [58].…”

Section: Picosecond Ultrasonicsmentioning

confidence: 99%

“…Since picosecond ultrasonics characterizes the out-of-plane properties by waves traveling normal to the surface, while Brillouin spectroscopy characterizes the inplane properties by waves traveling along the surface, the two techniques have also been exploited in a combined way, achieving a more complete characterization [62,[116][117][118].…”

Section: Brillouin Spectroscopymentioning

confidence: 99%

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Ultrasonic and Spectroscopic Techniques for the Measurement of the Elastic Properties of Nanoscale Materials

Beghi¹

2021

Nanomechanics - Theory and Application

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Materials at the nanoscale often have properties which differ from those they have in the bulk form. These properties significantly depend on the production process, and their measurement is not trivial. The elastic properties characterize the ability of materials to deform in a reversible way; they are of interest by themselves, and as indicators of the type of nanostructure. As for larger scale samples, the measurement of the elastic properties is more straightforward, and generally more precise, when it is performed by a deformation process which involves exclusively reversible strains. Vibrational and ultrasonic processes fulfill this requirement. Several measurement techniques have been developed, based on these processes. Some of them are suitable for an extension towards nanometric scales. Until truly supramolecular scales are reached, the elastic continuum paradigm remains appropriate for the description and the analysis of ultrasonic regimes. Some techniques are based on the oscillations of purpose-built testing structures, mechanically actuated. Other techniques are based on optical excitation and/or detection of ultrasonic waves, and operate either in the time domain or in the frequency domain. A comparative overview is given of these various techniques.

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Section: Picosecond Ultrasonicsmentioning

confidence: 99%

Section: Brillouin Spectroscopymentioning

confidence: 99%

Ultrasonic and Spectroscopic Techniques for the Measurement of the Elastic Properties of Nanoscale Materials

Beghi¹

2021

Nanomechanics - Theory and Application

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Elastic properties of α- and β-tantalum thin films

et al. 2019

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Atomic force microscopy for nanoscale mechanical property characterization

Stan

King

2020

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Over the past several decades, atomic force microscopy (AFM) has advanced from a technique used primarily for surface topography imaging to one capable of characterizing a range of chemical, mechanical, electrical, and magnetic material properties with subnanometer resolution. In this review, we focus on AFM as a nanoscale mechanical property characterization tool and examine various AFM contact and intermittent contact modes that add mechanical contrast to an imaged surface. Through detailed analysis of the tip-sample contact mechanics, this contrast can be converted into quantitative measurements of various nanomechanical properties including elastic modulus, shear modulus, wear rate, adhesion, and viscoelasticity. Different AFM modes that provide such measurements are compared and contrasted in this work on a wide range of materials including ceramics, metals, semiconductors, polymers, and biomaterials. In the last few years, considerable improvements have been made in terms of fast imaging capabilities, tip preservation, and quantitative mechanics for multifrequency measurements as well as well-known AFM modes like amplitude modulation and peak-force tapping. In line with these developments, a major highlight of this review is the discussion of the operation and capabilities of one such mode, namely, intermittent contact resonance AFM (ICR-AFM). The applications of ICR-AFM to nanoscale surface and subsurface quantitative mechanical characterizations are reviewed with specific examples provided for thin polymeric films and patterned nanostructures of organosilicate dielectric materials. The combination of AFM-based mechanical characterization with AFM-based chemical spectroscopy to allow nanoscale structure-property characterization is also discussed and demonstrated for the analysis of low-k dielectric/copper nanoelectronic interconnect structures and further highlights synergistic advances in the AFM field.

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Mechanical properties of elementary layers involved in a multilayer optical stack by photon-acoustic phonon interaction approaches

Cited by 3 publications

References 28 publications

Ultrasonic and Spectroscopic Techniques for the Measurement of the Elastic Properties of Nanoscale Materials

Ultrasonic and Spectroscopic Techniques for the Measurement of the Elastic Properties of Nanoscale Materials

Elastic properties of α- and β-tantalum thin films

Atomic force microscopy for nanoscale mechanical property characterization

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