2020
DOI: 10.1080/02670844.2020.1778412
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Mechanical properties of TiN films prepared in glow-arc transition region

Abstract: Titanium nitride (TiN) films were generated in the abnormal glow discharge (AGD) region and the glow-arc transition discharge (GATD) region by varying target current density (J a ) in an Ar/N 2 atmosphere in the pulsed DC magnetron sputtering system. The effects of different discharge regions on the structure and mechanical properties of TiN films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), scratch test and micro-hardness test. The results indicated that all TiN films exhi… Show more

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“…Various coatings have been proposed for this purpose, including TiN and TiC [5]. However, the TiN coating is less resistant to oxidation [6]. When the temperature reaches 500 ◦ C, the coating is obviously oxidized and ablated.…”
Section: Introductionmentioning
confidence: 99%
“…Various coatings have been proposed for this purpose, including TiN and TiC [5]. However, the TiN coating is less resistant to oxidation [6]. When the temperature reaches 500 ◦ C, the coating is obviously oxidized and ablated.…”
Section: Introductionmentioning
confidence: 99%