Mechanical properties of titanium nitride films obtained by reactively sputtering with hot target

Babinova, R V; Smirnov, V V; Useenov, A. S.; Кравчук, К. С.; Gladkikh, E. V.; Шаповалов, В. М.; Mylnikov, I. L.

doi:10.1088/1742-6596/872/1/012035

Cited by 19 publications

(10 citation statements)

References 4 publications

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“…To address this gap, TiN was modified with Nafion to protect the material from interacting with other species in the sample, which in turn affects the sensitivity of the sensor [ 36 , 37 ]. Overcoming this issue paves the path for the future development of a robust and reliable pH sensor for chemical and biological applications [ 38 , 39 ]. Experiments, analysis, and applications of the TiN sensor with Nafion modification are presented in the following sections.…”

Section: Introductionmentioning

confidence: 99%

Nafion Modified Titanium Nitride pH Sensor for Future Biomedical Applications

Shylendra

Wajrak

Alameh

et al. 2023

Sensors

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pH sensors are increasingly being utilized in the biomedical field and have been implicated in health applications that aim to improve the monitoring and treatment of patients. In this work, a previously developed Titanium Nitride (TiN) solid-state pH sensor is further enhanced, with the potential to be used for pH regulation inside the human body and for other biomedical, industrial, and environmental applications. One of the main limitations of existing solid-state pH sensors is their reduced performance in high redox mediums. The potential shift E0 value of the previously developed TiN pH electrode in the presence of oxidizing or reducing agents is 30 mV. To minimize this redox shift, a Nafion-modified TiN electrode was developed, tested, and evaluated in various mediums. The Nafion-modified electrode has been shown to shift the E0 value by only 2 mV, providing increased accuracy in highly redox samples while maintaining acceptable reaction times. Overcoming the redox interference for pH measurement enables several advantages of the Nafion-modified TiN electrode over the standard pH glass electrode, implicating its use in medical diagnosis, real-time health monitoring, and further development of miniaturized smart sensors.

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Section: Introductionmentioning

confidence: 99%

Nafion Modified Titanium Nitride pH Sensor for Future Biomedical Applications

Shylendra

Wajrak

Alameh

et al. 2023

Sensors

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“…Sputtering parameters, such as gas ratio, chamber pressure, and deposition power, were varied to optimize the sensor performance. Several trials of deposition runs have been conducted in various (nitrogen-deficient and nitrogen-rich) conditions and confirmed that the argon flow rate influenced the grain size, whilst the argon and nitrogen gas ratio determined the structural and electrical properties of the TiN films [ 29 , 30 ]. It was noted that the color of the TiN films (as shown in Figure 2 ) was related to the sputtering process parameters.…”

Section: Resultsmentioning

confidence: 99%

“…Previous work carried out in 1997 on metal nitrides showed that, for example, zirconium nitride (ZrN) and hafnium nitride (HfN), have exceptional surface-stability because of their interlinked mixture of covalent and ionic bonds [ 28 ]. Subsequently, research work on metal nitrides was conducted in 2001, where, a pH sensor integrating Complementary Metal Oxide Semiconductor (CMOS) in conjunction with an Extended Gate Field Effect Transistor (EGFET) was fabricated on the same chip using titanium nitride (TiN) as a sensing membrane, demonstrating a sensitivity of −57 mV/pH [ 27 , 29 ]. Later, in 2011, Y.H Chang et al [ 23 ] showed that Group-III nitrides, including GaN, AlN, InN, and their alloys are promising materials for next-generation chemical and biological sensors.…”

Section: Introductionmentioning

confidence: 99%

Titanium Nitride Thin Film Based Low-Redox-Interference Potentiometric pH Sensing Electrodes

Shylendra

Lonsdale

Wajrak

et al. 2020

Sensors

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In this work, a solid-state potentiometric pH sensor is designed by incorporating a thin film of Radio Frequency Magnetron Sputtered (RFMS) Titanium Nitride (TiN) working electrode and a commercial Ag|AgCl|KCl double junction reference electrode. The sensor shows a linear pH slope of −59.1 mV/pH, R2 = 0.9997, a hysteresis as low as 1.2 mV, and drift below 3.9 mV/h. In addition, the redox interference performance of TiN electrodes is compared with that of Iridium Oxide (IrO2) counterparts. Experimental results show −32 mV potential shift (E0 value) in 1 mM ascorbic acid (reducing agent) for TiN electrodes, and this is significantly lower than the −114 mV potential shift of IrO2 electrodes with sub-Nernstian sensitivity. These results are most encouraging and pave the way towards the development of miniaturized, cost-effective, and robust pH sensors for difficult matrices, such as wine and fresh orange juice.

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Section: Surface Properties and Applications Of Tmnsmentioning

confidence: 99%

“…Out of all the TMNs, one of the most commonly used thin film materials is the TiN due to its unique properties such as less resistivity, proper adhesion, higher wear and oxidation resistance, superior corrosion resistance, better chemical stability, higher hardness, etc. [79][80][81][82][83] 3.1.1. Surface Properties of TiN Films Nishat Arshi et al [84] studied the effect of Ar (5, 10, 15, and 20 sccm) and N 2 (fixed at five sccm) flow rates on the properties of TiN films deposited on a silicon substrate, employing DC magnetron sputtering process.…”

Section: Tinmentioning

confidence: 99%

Magnetron Sputtered Thin Films Based on Transition Metal Nitride: Structure and Properties

Bharani

Sharma

2022

Physica Status Solidi (a)

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Transition metal nitride (TMN) thin films exhibit outstanding physical, chemical, and mechanical properties, making them best suitable for a wide variety of applications. The most commonly used technique to produce metal nitride thin films with specific properties at optimum conditions is magnetron sputtering. Considering this, this review begins with advancements in the sputtering process from basic diode sputtering to the most commonly used pulsed magnetron sputtering. Further, the literature on several TMNs deposited via magnetron sputtering is summarized, referring to several articles that have been published during the last decades. The main emphasis lies on nitride-based thin films' structural, morphological, and mechanical aspects for various applications. In addition, the influence of reactive gas flow rate, substrate temperature, layer thickness, postannealing temperature, substrate bias voltage, protective layers, the sputtering technique adopted, etc. on the quality and performance of the thin films is also focused. The overall review work can be beneficial for the students and researchers in understanding the basic sputtering phenomenon with its advancements, the relationship between deposition parameters and surface properties, and to know the current research trend for exploring several research gaps in the literature.

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Mechanical properties of titanium nitride films obtained by reactively sputtering with hot target

Cited by 19 publications

References 4 publications

Nafion Modified Titanium Nitride pH Sensor for Future Biomedical Applications

Nafion Modified Titanium Nitride pH Sensor for Future Biomedical Applications

Titanium Nitride Thin Film Based Low-Redox-Interference Potentiometric pH Sensing Electrodes

Magnetron Sputtered Thin Films Based on Transition Metal Nitride: Structure and Properties

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