Mechanical Testing of Thin Films and Small Structures

Kraft, O.; Volkert, Cynthia A.

doi:10.1002/1527-2648(200103)3:3<99::aid-adem99>3.0.co;2-2

Cited by 129 publications

(36 citation statements)

References 57 publications

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“…[1][2][3] The configuration that has received the most attention is a metal film of nominally uniform thickness in the micrometer range deposited on and bonded to the flat surface of a substrate; usually, the substrate is relatively thick, compared with the film, and it has a relatively small coefficient of thermal expansion. In this case, stress can be imposed on the film by changing the temperature of the system.…”

Section: Measuring Plastic Deformationmentioning

confidence: 99%

Dislocation Plasticity in Thin Metal Films

Kraft¹,

Freund²,

Phillips³

et al. 2002

MRS Bull.

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This article describes the current level of understanding of dislocation plasticity in thin films and small structures in which the film or structure dimension plays an important role. Experimental observations of the deformation behavior of thin films, including mechanical testing as well as electron microscopy studies, will be discussed in light of theoretical models and dislocation simulations. In particular, the potential of applying strain-gradient plasticity theory to thin-film deformation is discussed. Although the results of all studies presented follow a "smaller is stronger" trend, a clear functional dependence has not yet been established.

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Section: Measuring Plastic Deformationmentioning

confidence: 99%

Dislocation Plasticity in Thin Metal Films

Kraft¹,

Freund²,

Phillips³

et al. 2002

MRS Bull.

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“…In recent years, the bulge test has emerged as an appropriate technique for investigating the monotonic mechanical properties of very thin freestanding films. 15 It therefore makes sense to also apply it to the study of their fatigue properties.…”

Section: Introductionmentioning

confidence: 99%

Bulge fatigue testing of freestanding and supported gold films

Merle

Göken

2014

J. Mater. Res.

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The bulge test was used to investigate the fatigue properties of gold thin films with a thickness between 100 and 300 nm. The membranes were pressurized at a rate of 0.2 Hz up to 10 5 times, during which their stress and strain states were continuously recorded. Gold films on a silicon nitride substrate were cyclically loaded into tension and compression. Due to the presence of the substrate, no membrane failure was observed, but the residual stress shifted from an initially tensile state to an increasingly compressive one. Typical fatigue damage mechanisms consisting of extrusions were found in some large grains. Freestanding films were cyclically loaded in pure tension until failure occurred. The data acquired during the fatigue tests show a strong ratcheting of the films, which is indicative of cyclic plastic creep. Microstructural investigations clearly show grain boundary sliding in very thin films with columnar grains extending through the thickness.

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“…This length scale may be in the range of micrometers for plasticity mechanisms, millimeters for fracture mechanisms, or below a nanometer for elastic properties. 1 We can generally distinguish between the microstructural length scale (e.g., grain size) and the dimensional length scale (e.g., wire diameter). 2 Here we limit ourselves to the study of dimensional constraints.…”

Section: Introductionmentioning

confidence: 99%

Strength and fracture of Si micropillars: A new scanning electron microscopy-based micro-compression test

et al. 2007

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A novel method for in situ scanning electron microscope (SEM) micro-compression tests is presented. The direct SEM observation during the instrumented compression testing allows for very efficient positioning and assessment of the failure mechanism. Compression tests on micromachined Si pillars with volumes down to 2 m 3 are performed inside the SEM, and the results demonstrate the potential of the method. In situ observation shows that small diameter pillars tend to buckle while larger ones tend to crack before failure. Compressive strength increases with decreasing pillar diameter and reaches almost 9 GPa for submicrometer diameter pillars. This result is in agreement with earlier bending experiments on Si. Difficulties associated with precise strain measurements are discussed.

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Mechanical Testing of Thin Films and Small Structures

Cited by 129 publications

References 57 publications

Dislocation Plasticity in Thin Metal Films

Dislocation Plasticity in Thin Metal Films

Bulge fatigue testing of freestanding and supported gold films

Strength and fracture of Si micropillars: A new scanning electron microscopy-based micro-compression test

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