2012
DOI: 10.1063/1.3684248
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Mechanically compliant grating reflectors for optomechanics

Abstract: We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 × 10 5 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F = 1200, and used the optical response to probe the mechanical prop… Show more

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Cited by 52 publications
(52 citation statements)
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“…Several important observations can be made from this figure. The largest value for g (1) sin increases with |ζ |; in the figure we show data points for ζ = −0.5 (20% intensity reflectivity; red data marked with squares), ζ = −1.0 (50%; orange, triangles), and ζ = −12.9 (99.4%; blue, circles), the first two of which represent a typical reflectivity for SiN membranes used for optomechanical experiments [72], and the last membranes with increased reflectivity due to the use of subwavelength patterning [73,74]. Secondly, the value of N for which the coupling strength is optimized is highly dependent on the value of d; the reflectivity of the array depends on d mod (λ/2), so that one is free to increase the element spacing by integer multiples of half a wavelength without affecting its transmission properties (in the limit of a wavelength-independent reflectivity).…”
mentioning
confidence: 99%
“…Several important observations can be made from this figure. The largest value for g (1) sin increases with |ζ |; in the figure we show data points for ζ = −0.5 (20% intensity reflectivity; red data marked with squares), ζ = −1.0 (50%; orange, triangles), and ζ = −12.9 (99.4%; blue, circles), the first two of which represent a typical reflectivity for SiN membranes used for optomechanical experiments [72], and the last membranes with increased reflectivity due to the use of subwavelength patterning [73,74]. Secondly, the value of N for which the coupling strength is optimized is highly dependent on the value of d; the reflectivity of the array depends on d mod (λ/2), so that one is free to increase the element spacing by integer multiples of half a wavelength without affecting its transmission properties (in the limit of a wavelength-independent reflectivity).…”
mentioning
confidence: 99%
“…A novel approach is to use high-contrast gratings (HCGs), fabricated from semiconductors or high refractive index (highindex) dielectrics [17][18][19] , that can be designed with large reflection 20 or transmission 21 efficiencies. Wavefront control was originally achieved by rendering one dimensional gratings aperiodic by gradually modifying the local period and duty cycle of the grating [21][22][23] .…”
mentioning
confidence: 99%
“…For these reasons, highcontrast gratings have become a novel platform for optomechanics, 4-6 enabling the construction of high-finesse optical cavities incorporating a mechanically compliant, highly reflective mirror, of low mass and high mechanical quality factor. In previous work, 5,6 we used an HCG patterned in silicon nitride as one end mirror of a FabryPerot cavity, simultaneously achieving a finesse of F = 2800 and mechanical quality factor of Q = 780 000. By exploiting the techniques of cavity optomechanics, 7 we have optically cooled mechanical modes of our device from room temperature to an effective temperature of T ≈ 1 K.…”
Section: Introductionmentioning
confidence: 99%