Mechanically fixed and thermally insulated micromechanical structures for GaAs heterostructure based MEMS devices

Lalinský, T.; Hašc̆ı́k, Š.; Mozolová, Ž.; Burian, E.; Krnac, M.; Tomáška, M.; Škriniarová, Jaroslava; Drzˇík, M.; Kostic̆, I.; Matay, L.

doi:10.1108/13565360310455526

Cited by 2 publications

(4 citation statements)

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“…Some of them are intended to help designers to collaborate or coordinate by sharing product information and manufacturing services through formal or informal interactions [8,26,51]. Others propose formalized frameworks that manage conflicts between design constraints and assist designers in making decisions [8,37,38,42]. There are also national-level efforts involving university and industry collaboration to make a variety of engineering services available over the Internet [29].…”

Section: Collaborative Design For Memsmentioning

confidence: 99%

“…Recently, a novel bulk GaAs micromachining technology has been introduced [41,42]. It permits to fabricate very thin GaAs heterostructure based cantilevers and bridges fully compatible with the processing technology of GaAs pHEMT.…”

Section: Back Side Bulk Micromachiningmentioning

confidence: 99%

“…A further progress in the design of micromachined power sensors has been demonstrated by implementation of pHEMT processing technology compatible with the micromachining technology of the micromechanical structures (membrane, bridge, cantilever) [1,9,[39][40][41][42]. FIGURE 21.…”

Section: Micromachined Thermal Convertersmentioning

confidence: 99%

“…Several kinds of components made of GaAs based technology of membrane-like structures has been tested using this tool [14,19,25,41,42]. In Fig.…”

mentioning

confidence: 99%

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Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

Zha

Mems/Nems

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Micro-Electro-Mechanical Systems (MEMS) design and manufacturing are inherently multi-physical and multi-disciplinary; no single person is able to perform a full development process for a MEM device or system. This chapter presents a web-enabled design platform for collaborative design of MEMS. The proposed web-based distributed object modeling and evaluation framework with client-knowledge server architecture, KS-DMME, allows multi-users/designers in different locations to participate in the same design process. Under this framework, concurrent integrated MEMS design and simulation models can be built using both local and distributed resources, and the design collaboration can be realized by exchanging services between modules based upon CORBA standard communication protocol. To facilitate the rapid construction of the concurrent integrated design models for MEMS, a prototype web-enabled design system, Web-MEMS Designer, is implemented through concurrent integration of multiple distributed and cooperative knowledge sources and software. By use of the developed prototype system, MEMS design and simulation can be carried out simultaneously and intelligently in an integrated but open design environment on the web. A case study of a microgripper design for micro robotic assembly systems is provided to illustrate how designers in different teams and organizations may participate and collaborate in MEMS design.

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Section: Collaborative Design For Memsmentioning

confidence: 99%

Section: Back Side Bulk Micromachiningmentioning

confidence: 99%