Mechanism and Simulation of Bi-Layered Micro Optical Fiber Resonator

Abstract

Micro-resonators could be fabricated directly on the optical fiber top by micro mechanical process. The micro optical fiber resonator has more great advantages comparing with the traditional optical excited micro silicon resonators, such as being optically positioned easily between the resonator and the optical fiber end. By this way, the optical excited light through the fiber core is thus put on the micro resonator accurately and then partially reflected by the Fabry-Perot interferometer formed between fiber top and resonator surface. The reflected light from F-P interferometer was sent to the opto-electric detector PIN to demodulate the detected parameter. A matched metal layer can be deposited atop of the resonator in order to increase the optical excitation efficiency. Firstly mechanism analysis of optical excited bi-layered resonator is given by fully considering Longitudinal thermal strain effect and Bi-coating effect, and then the typical theoretical models were setup including the resonating frequency and resonant amplitude, and temperature sensing feature was simulated by computer software. The simulation results indicated that the average frequency sensitivity of temperature sensing is about 29Hz/°C.