Flexible pressure sensors demonstrate
promising potential in human–machine
interfaces, wearable devices, and implantable electronics. In this
study, a highly sensitive pressure sensor was developed, comprising
a polyimide substrate with a high-density micropyramid array (HD-μPA),
an active piezoelectric component of poly(vinylidenefluoride-co-trifluoroethylene) [P(VDF-TrFE)]/barium titanate (BTO)
nanofiber mat, and silver nanowires (AgNWs) as the top electrode.
A mold for imprinting of polyimide HD-μPA was fabricated by
an ultraprecision microgroove fly cutting process, which can obtain
μPA with a higher density than the mold fabricated by anisotropic
wet etching of silicon. The piezoelectric output of the HD-μPA-based
pressure sensor was approximately 1.7 times higher than that of the
sensor with a flat substrate. The improved sensitivity of the sensor
was attributed to the stress concentration effect of HD-μPA
and elastic modulus mismatch between the polyimide HD-μPA and
the P(VDF-TrFE)/BTO nanofiber mat. A pressure detection limit as low
as 0.6 Pa was achieved for the HD-μPA-based pressure sensor,
showing many potential applications in flexible electronics.