The dynamic performance of ultra-precision cutting machine tools is an important factor for its machining accuracy. To improve the precision of the machine tool, a surface topography model is built in this paper and the tool path during the cutting process is achieved by dynamic finite element analysis (DFEA) of the air spindle in ANSYS, surface topography is obtained using MATLAB simulation by combing the model with the tool path, and an experiment is carried out for validation. Results show the simulation surface is highly consistent with the experimental result. Dynamic performance of the spindle is the main factor for texture generation, and optimization of spindle is investigated, DFEA of the optimized spindle shows better performance, and the connection mode between diamond tool and cutter head should be further studied.