“…Theoretical calculations suggest that the nearest neighbor Al-N is favored in silicon, the ground state lies in the silicon bandgap, and a discrete state is provided. 12,13) Recently, we also reported that beryllium and the group II element, Zn, and group VI elements, S and Se, were introduced into a Si wafer to form deep levels in a TFET. 14,15) Figure 1(c) shows a charge-stability diagram, and Fig.…”