2012
DOI: 10.1364/oe.20.014848
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Mechanism of femtosecond-laser-induced periodic nanostructure formation on crystalline silicon surface immersed in water

Abstract: Focused on silicon surface in water, superimposed multiple shots of linearly polarized 800-nm, 100-fs, 10-Hz laser pulses at lower fluence than the single-pulse ablation threshold are shown to produce two kinds of periodic nanostructures with almost constant periods of 150 nm and 400 nm. Surface plasmon polaritons excited in the surface layer illustrates well the formation of nanostructures and its dynamic properties observed. Pump and probe measurements of the ultrafast change in surface reflectivity during t… Show more

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Cited by 119 publications
(95 citation statements)
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“…It is clear that the reduction of K is non-thermally developed with an increase in N, being accompanied by neither thermal melting nor other effects to destroy the initial interference pattern. These results strongly suggest that the ablation to reduce K is induced by the spatial standing SPP waves 23,30 excited in the fringe period, and a single standing SPP mode survives with increasing N to form the nanograting at q ¼ 5. The origin of integer q will be identified by a model calculation in Sec.…”
Section: A Formation Of Nanogratingsmentioning
confidence: 80%
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“…It is clear that the reduction of K is non-thermally developed with an increase in N, being accompanied by neither thermal melting nor other effects to destroy the initial interference pattern. These results strongly suggest that the ablation to reduce K is induced by the spatial standing SPP waves 23,30 excited in the fringe period, and a single standing SPP mode survives with increasing N to form the nanograting at q ¼ 5. The origin of integer q will be identified by a model calculation in Sec.…”
Section: A Formation Of Nanogratingsmentioning
confidence: 80%
“…Those are concerned with self-organization of surface instability, 1,16 linear and/or nonlinear refractive index change, 3,7 Coulomb explosion, 4 second-harmonic generation, 5,17 nanoplasma formation, 18,19 optical near-fields, 20,21 and excitation of surface plasmon polaritons (SPPs) in the surface layer. 22,23 Some of these mechanisms should contribute to the observed periodic nanostructure formation in specific cases. However, there have been few experiments to successfully demonstrate or control the fundamental interaction process responsible for the nanostructure formation.…”
Section: Introductionmentioning
confidence: 99%
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