Mechanism of preferential orientation in sputter deposited titanium nitride and yttria-stabilized zirconia layers

Mahieu, Stijn; Ghekiere, Pieter; Winter, G. De; Heirwegh, S.; Depla, Diederik; Gryse, Roger De; Lebedev, Oleg I.; Tendeloo, G. Van

doi:10.1016/j.jcrysgro.2005.02.014

Cited by 54 publications

(38 citation statements)

References 10 publications

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“…The (100) planes are the cleavage planes of MgO, they are charge neutral and naturally occurring orientation, and have the lowest surface energy. Orientation attributed to surfaces (111) can be the fastest growing direction for a material with the NaCl structure (Mahieu et al 2005). At low pressures or vacuum, the growth seems to be kinetically limited and (111) oriented grains have the largest perpendicular growth rate over (100) oriented grains.…”

Section: Structural Study Of Mgo Thin Filmsmentioning

confidence: 99%

Optical properties of MgO thin films grown by laser ablation technique

et al. 2016

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We have investigated the structural, linear and nonlinear optical properties of high-quality MgO thin films deposited by laser ablation technique on quartz substrates. The deposition process was carried out at various temperatures of the substrates from room temperature to 600°C in order to investigate these properties of the films and their mutual influence. The structural and morphological properties of the films were investigated by X-ray diffraction. The quality of the films was improved with an increase of the substrate temperature. The linear optical properties of the films were studied by classic and timeresolved photoluminescence spectra in the broad range of the temperature form 13 to 300 K. An innovative time-resolved photoluminescence technique let us precisely measure the decay time in the real time. Results of these measurements reveal a simple exponential decay behavior typical for well oriented crystalline thin films. Presented spectra confirm high structural and linear optical quality of investigated films. The nonlinear optical properties of the films were investigated by third harmonic generation technique. Our results indicated that the substrate temperature slightly affected nonlinear optical properties and the values of third order nonlinear susceptibilities at the 600°C were found to be smaller relative to RT. All these unusual properties of MgO thin films deposited by laser ablation technique made this material very interesting for the subsequent oriented growth of the other oxide a but also for potential other optical applications.

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Section: Structural Study Of Mgo Thin Filmsmentioning

confidence: 99%

Optical properties of MgO thin films grown by laser ablation technique

et al. 2016

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“…The correlation between off-normal deposition from one source and biaxial alignment is well documented and understood for several materials. 16,19,20,[24][25][26][27] This is not the case when growing films from two material sources in a cosputtering arrangement.…”

mentioning

confidence: 99%

Texture and microstructure in co-sputtered Mg-M-O (M = Mg, Al, Cr, Ti, Zr, and Y) films

Saraiva

Depla

2012

Journal of Applied Physics

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“…As described by Mahieu et al. [27,28] the fastest growing direction under these conditions is [220] which will result in <220> texture as seen in Fig. 1.a.…”

Section: Accepted M Manuscriptmentioning

confidence: 85%

“…1.c., a trend is seen as substrate bias is increased from -25 V to -75 V, the degree of <220> orientation increases as well. However, it is unlikely that increased bias would change the reactive oxygen from the molecular to the atomic state which promotes (220) texture as described by Mahieu et al [27,28]. However, it has previously been shown that ion bombardment promotes <111> or <220> texture or a mixture thereof as planes in all other directions have higher etch rates and are successfully eliminated by the shadowing process during the growth of the columns [30].…”

Section: Accepted M Manuscriptmentioning

confidence: 99%

Deposition of yttria-stabilized zirconia thin films by high power impulse magnetron sputtering and pulsed magnetron sputtering

Sønderby

Aijaz

Helmersson

et al. 2014

Surface and Coatings Technology

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Yttria-stabilized zirconia (YSZ) thin films were reactively sputter-deposited by high power impulse magnetron sputtering (HiPIMS) and pulsed direct current magnetron sputtering (DCMS). The use of substrate bias voltage was studied in both modes of deposition as a process parameter to promote the growth of dense and less columnar films. Films were deposited on both Si(100) and NiO-YSZ fuel cell anodes. The texture, morphology and composition of the deposited films were investigated with regard to their application as thin electrolytes for solid oxide fuel cells (SOFCs). Independent of the deposition mode the films were found to be stoichiometric. The application of substrate bias voltage had opposite effects on texture and crystallinity of films deposited by pulsed DCMS and HiPIMS. Films deposited by pulsed DCMS became highly crystalline and <220> textured at high bias voltage whereas bias applied to HiPIMS deposited films disrupted crystal growth leading to deterioration of crystallinity. Comparing film morphology, it was found that pulsed DCMS films were columnar and contained voids regardless of the applied substrate bias. When depositing by HiPIMS a window of operation at a bias voltage of -25 V to -50 V was found in which it is possible to deposit non-columnar thin films without voids and cracks as desired for SOFC applications.

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Mechanism of preferential orientation in sputter deposited titanium nitride and yttria-stabilized zirconia layers

Cited by 54 publications

References 10 publications

Optical properties of MgO thin films grown by laser ablation technique

Optical properties of MgO thin films grown by laser ablation technique

Texture and microstructure in co-sputtered Mg-M-O (M = Mg, Al, Cr, Ti, Zr, and Y) films

Deposition of yttria-stabilized zirconia thin films by high power impulse magnetron sputtering and pulsed magnetron sputtering

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