Mechanism of Unstable Material Removal Modes in Micro Cutting of Silicon Carbide

Zhao, Wei; Hong, Haibo; Wang, Hongzhi

doi:10.3390/mi10100696

Cited by 6 publications

(4 citation statements)

References 37 publications

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“…When an RSR is integer, the circular waviness profiles can be mathematically described by Equation (11), whose period and amplitude can be calculated by Equations (12) and (13). When RSR is non-integer and the wave-shift value T θ = 1 q , the circular waviness profiles can be mathematically described by Equation 14, whose period and amplitude can be calculated by Equations (15) and (16). Based on the Equations (11)- (16), the circular waviness profiles on the edge of each circle surface of the Fresnel micro-structured mold can be illustrated, as shown in Figure 8a,b and Figure 8c,d, representing the integer RSR and non-integer RSR, respectively.…”

Section: Modeling Of the Circular Waviness Profilesmentioning

confidence: 99%

“…In order to achieve large-scale and low-cost production, it is currently vigorously developing replication processing technologies such as glass molding [9][10][11][12], whose key component is Fresnel micro-structured mold. The mold material used for glass molding is mainly hard-brittle material such as silicon carbide (SiC) and tungsten carbide (WC) [13][14][15]. Ultra-precision grinding is the preferred manufacturing technology to achieve the high-precision requirements for hard-brittle components [16][17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

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Suppression of Surface Waviness Error of Fresnel Micro-Structured Mold by Using Non-Integer Rotation Speed Ratio in Parallel Grinding Process

et al. 2020

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Fresnel micro-structured lenses are widely used in the field of modern optoelectronic technology. High-precision Fresnel micro-structured mold is the key technology to achieve its large-scale replication production. Focusing on the surface waviness error of Fresnel micro-structured mold machined by parallel grinding process, this paper conducted theoretical modeling and experiment research. Based on the grinding kinematics theory, the simulation models of the surface waviness topography and the circular waviness profiles of the ground Fresnel micro-structured mold were developed, considering the combined influence of the non-integer rotation speed ratio and other grinding parameters. A series of grinding experiments were carried out to verify the proposed simulation models. The influence of a non-integer rotation speed ratio and a wave-shift value upon the surface waviness error of the ground Fresnel micro-structured molds were analyzed. Both the simulation and experimental results proved that choosing the non-integer rotation speed ratio and a proper wave-shift value could greatly reduce the surface waviness error and improve the surface quality and uniformity.

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Section: Modeling Of the Circular Waviness Profilesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Suppression of Surface Waviness Error of Fresnel Micro-Structured Mold by Using Non-Integer Rotation Speed Ratio in Parallel Grinding Process

et al. 2020

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“…Wen Gu et al improved the assessment of the brittle-ductile transition based on the surface conditions using a method of changing the position to observe the two-dimensional plane with an optical microscope and then calculating the BDTD of the material by extracting the envelope curve [ 19 ]. Three-dimensional microscopic measurement methods mainly use a scanning electron microscope (SEM), atomic force microscope (AFM), transmission electron microscope (TEM), etc., as well as a white light interferometer, laser confocal measuring instrument, or other three-dimensional scanning equipment for performing measurements; then, according to the three-dimensional information, the position of the brittle-ductile transition point is judged, and the BDTD is obtained [ 20 , 21 , 22 , 23 ]. For example, Fang et al used an SEM and AFM to observe a surface after taper cutting and obtained the critical cutting thickness of the brittle-ductile transition during the nano-cutting of single-crystal silicon [ 24 , 25 ].…”

Section: Introductionmentioning

confidence: 99%

A Self-Established “Machining-Measurement-Evaluation” Integrated Platform for Taper Cutting Experiments and Applications

Yang

Zhu

et al. 2021

Micromachines

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Taper-cutting experiments are important means of exploring the nano-cutting mechanisms of hard and brittle materials. Under current cutting conditions, the brittle-ductile transition depth (BDTD) of a material can be obtained through a taper-cutting experiment. However, taper-cutting experiments mostly rely on ultra-precision machining tools, which have a low efficiency and high cost, and it is thus difficult to realize in situ measurements. For taper-cut surfaces, three-dimensional microscopy and two-dimensional image calculation methods are generally used to obtain the BDTDs of materials, which have a great degree of subjectivity, leading to low accuracy. In this paper, an integrated system-processing platform is designed and established in order to realize the processing, measurement, and evaluation of taper-cutting experiments on hard and brittle materials. A spectral confocal sensor is introduced to assist in the assembly and adjustment of the workpiece. This system can directly perform taper-cutting experiments rather than using ultra-precision machining tools, and a small white light interference sensor is integrated for in situ measurement of the three-dimensional topography of the cutting surface. A method for the calculation of BDTD is proposed in order to accurately obtain the BDTDs of materials based on three-dimensional data that are supplemented by two-dimensional images. The results show that the cutting effects of the integrated platform on taper cutting have a strong agreement with the effects of ultra-precision machining tools, thus proving the stability and reliability of the integrated platform. The two-dimensional image measurement results show that the proposed measurement method is accurate and feasible. Finally, microstructure arrays were fabricated on the integrated platform as a typical case of a high-precision application.

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“…Researches [21,22] established that the main reason for residual stresses is the high variation of the hardness value of the minerals within the material. Recent research is based on the application of molecular dynamics simulations to establish correlations between stress/machining conditions and crack growth [23].…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tool radius and micro-cutting speed influence on micro-cutting mechanisms for marble based material

Pjević

Popović

Tanović

2021

Surf. Topogr.: Metrol. Prop.

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In this paper, a detailed experimental analysis of the effect of tool tip radius and cutting speed on the proposed mechanism of micro-cutting Plavi tok marble was performed. Although Plavi tok marble belongs to extremely brittle materials, experiments have shown that it can be processed in ductile mode (plastic deformation mode), i.e. without the presence of brittle fracturing of the material. Moreover, it has been established that the range of plastic deformation zone is a function of the tool tip radius and the cutting speed. The diamond tools used during the experiments had tip radius values of r = 0.15 and r = 0.2 mm, while cutting speeds were 15 and 25 m s−1. When using tools with higher tip radius values, with increasing cutting speed, the critical penetration depth (ductile-brittle transition) increased from 8.8 to 9.3 μm. On the other hand, tools with lower radius value led to a reduction of the plastic deformation zone range. This declining trend of plastic deformation zone continued during increased cutting speed, with critical penetration depths of 8.6 and 8.3 μm for cutting speeds of 15 and 25 m s−1, respectively. The intensity of lateral/radial destruction in the brittle fracturing mode was also directly dependent on the processing conditions. The reduction was achieved by using tools with a lower value of the tip radius while processing at lower speeds. In this paper, the identification of the components of the cutting force was carried out, whose intensities indicate the occurrence of the brittle destruction within the material.

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Mechanism of Unstable Material Removal Modes in Micro Cutting of Silicon Carbide

Cited by 6 publications

References 37 publications

Suppression of Surface Waviness Error of Fresnel Micro-Structured Mold by Using Non-Integer Rotation Speed Ratio in Parallel Grinding Process

Suppression of Surface Waviness Error of Fresnel Micro-Structured Mold by Using Non-Integer Rotation Speed Ratio in Parallel Grinding Process

A Self-Established “Machining-Measurement-Evaluation” Integrated Platform for Taper Cutting Experiments and Applications

Experimental investigation of the tool radius and micro-cutting speed influence on micro-cutting mechanisms for marble based material

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