2024
DOI: 10.1016/j.jmatprotec.2024.118392
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Mechanisms and characterization of a novel hybrid laser-enhanced particle laden electrochemical fabrication process for high quality micro-dimples on germanium wafers

Hao Zhu,
Jincai Han,
Jun Wang
et al.
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Cited by 6 publications
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“…By contrast, the stray corrosion associated with electrochemical dissolution can be minimized by introducing laser irradiation. Studies have demonstrated that laser irradiation can change the electrode state, improve the overpotential and mass transfer, and enhance the ECM localization performance. , Thus, as shown in recent years, laser-assisted ECM is indeed a preferred machining process for accurate localization, as well as higher energy densities and flexibility, and it is now used widely in aviation and aerospace. For example, Zhang et al studied the laser electrochemical machining of an aluminum alloy and found that the laser-induced shockwave enhanced the machining localization via the precise removal of the oxide layer within the laser-irradiated area, and they improved the electrochemical machining rate by changing the electrode potential.…”
Section: Introductionmentioning
confidence: 98%
“…By contrast, the stray corrosion associated with electrochemical dissolution can be minimized by introducing laser irradiation. Studies have demonstrated that laser irradiation can change the electrode state, improve the overpotential and mass transfer, and enhance the ECM localization performance. , Thus, as shown in recent years, laser-assisted ECM is indeed a preferred machining process for accurate localization, as well as higher energy densities and flexibility, and it is now used widely in aviation and aerospace. For example, Zhang et al studied the laser electrochemical machining of an aluminum alloy and found that the laser-induced shockwave enhanced the machining localization via the precise removal of the oxide layer within the laser-irradiated area, and they improved the electrochemical machining rate by changing the electrode potential.…”
Section: Introductionmentioning
confidence: 98%