The proton transport property of Nafion nanothin films (4-300 nm) has been investigated by electrochemical impedance spectroscopy (EIS) using interdigitated array (IDA) of gold electrodes on SiO 2 substrate. The proton conductivity has been investigated as a function of film drying/heating protocol, relative humidity, temperature and film thickness. It is found that the film treatment protocol makes a difference in film transport property. Ultimately, the proton conductivity and capacitance of the Nafion nanothin film is thicknessdependent, where the former decreased and the latter increased exponentially with decreasing film thickness. Moreover, the activation energy increased exponentially with decreasing film thickness. The proton conductivity of the thin films of Nafion is significantly lower than that of the membrane counterpart regardless of the thickness, which is consistent with the high activation energy found in the thin films. These differences are likely related to the polymer confinement and morphological differences between the thin films and the freestanding membrane. Proton transport is a key functional property of the ionomer used in polymer electrolyte based energy conversion and storage devices including polymer fuel cells (PEFC), 1 polymer electrolyte membrane (PEM) water electrolyzers, 2 photo electrochemical cells 3,4 and artificial photosynthesis device.5 For PEFCs and PEM electrolyzers, Nafion is the most extensively employed. As a freestanding film of thickness (25-100 μm thick), Nafion serves the function of the electrolyte membrane separating the anode and the cathode. The ionomer is also present in the electrochemically active component of these energy conversion devices as a thin film coating the electrocatalyst. For example, the conventional PEFC catalyst layer (CL) is a porous composite layer (10-25 μm thick) of Platinized carbon (Pt/C) and ionomer. In the CL, the ionomer forms a semi-continuous, web-like nanothin film (4-10 nm) covering the aggregates of Pt/C. 1,6 The thickness of such nanothin Nafion films in the CL is comparable to the ionic domain size (∼4 nm) in the bulk Nafion membrane. 7,8 It is obvious that the ionomer structure and property will affect both the proton and mass transport, which in turn will impact the local electrochemical reaction rate and, thereby, the overall PEFC performance. In fact, researchers of the electrochemical energy research laboratory at General Motors (GM) 9 examined the electrode performance as a function of catalyst loading and found that low-Pt loading catalyst layers exhibited higher transport losses, which they attributed to the transport resistance of ionomer thin film covering the catalyst. The proton conductivity of Nafion membrane is widely investigated and discussed in the literature. [10][11][12][13] In contrast, the proton conductivity of thin Nafion film has remained relatively unexplored, especially for ionomer films of thickness comparable to ionic domain size (∼4-5 nm). The ionic conduction property of materials is highly reg...