2003
DOI: 10.1143/jjap.42.50
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Memory Effect and Redistribution of Mg into Sequentially Regrown GaN Layer by Metalorganic Chemical Vapor Deposition

Abstract: Mg redistribution into a subsequently regrown GaN epilayer by metalorganic chemical vapor deposition (MOCVD) is studied. Dopant profiles from secondary ion mass spectrometry (SIMS) on n-p-n GaN samples have been analyzed. The regrowth study in a Mg-free reactor reveals that a Mg-rich film is present on MOCVD as-grown GaN:Mg base layers and can be removed by an acid etch, and that a slow Mg decay into the sequentially regrown GaN results from this Mg-rich surface film. We believe the commonly seen Mg memory eff… Show more

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Cited by 168 publications
(97 citation statements)
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“…The last quantum barrier is kept to be 12 nm to suppress the Mg diffusion. 27 Meanwhile, the quantum well thickness is 3 nm for all wells. Finally, a 0.2 lm p-GaN layer was grown, and the effective hole concentration is estimated to be 3 Â 10 17 cm À3 .…”
mentioning
confidence: 99%
“…The last quantum barrier is kept to be 12 nm to suppress the Mg diffusion. 27 Meanwhile, the quantum well thickness is 3 nm for all wells. Finally, a 0.2 lm p-GaN layer was grown, and the effective hole concentration is estimated to be 3 Â 10 17 cm À3 .…”
mentioning
confidence: 99%
“…We believe that the BHF treatment improved the voltage by reducing Mg diffusion into the n ++ -GaN layer, which could compensate electron carriers required to form an abrupt junction. 15,19,21) Finally, the best results were obtained from the sample treated in BHF with in-situ activation prior to TJ regrowth, which showed voltages of 3.4 V at 20 A=cm 2 and 4.5 V at 1 kA=cm 2 . These J-V characteristics are reasonably close to those of a diode with the MOCVD-MBE hybrid TJ contacts reported by Young et al (3.05 V at 20 A=cm 2 ), 15) but the voltage of the MOCVD TJ sample could be increased owing to structural differences, including poor n-contact on lightly doped n-GaN and extra resistance from the substrate.…”
Section: ++mentioning
confidence: 98%
“…The device structure was based around the conventional III-nitride LED fabrication processes and utilized the same metal-organic chemical vapor deposition (MOCVD) growth, lithography, etching and contacting steps. The MQW stack was placed under the n-and p-doped regions in order to avoid the magnesium (Mg) memory effect [43,44] in MOCVD and to avoid a dry etching of the p-doped layer. The electrically excited sample showed a strong blue emission at room temperature at 450nm wavelength with 160 mA injection current, corresponding to the emission from the InGaN AR.…”
Section: Diffusion Injected Buried Mqw Led (Diled)mentioning
confidence: 99%