2018
DOI: 10.1038/s41565-018-0302-0
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Memristor crossbar arrays with 6-nm half-pitch and 2-nm critical dimension

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Cited by 436 publications
(319 citation statements)
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“…For example, in analog matrix-vector multiplication, voltage drops across metal interconnect lines cause computational errors and, therefore, the memristor array size must be limited. Thus, it is essential to demonstrate all the aforementioned properties in nanometer-scale memristors repeatedly and reproducibly.Among various forms of memristors, oxide memristors outperform others by possessing the advantages of lower programming and computing energy, favorable scaling in cell size, [10,11,30] and CMOS-compatibility in materials and fabrication. This further benefits the energy and area efficiency by amortizing the costs of anolog to digital converters (ADC) required in the circuit.…”
mentioning
confidence: 99%
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“…For example, in analog matrix-vector multiplication, voltage drops across metal interconnect lines cause computational errors and, therefore, the memristor array size must be limited. Thus, it is essential to demonstrate all the aforementioned properties in nanometer-scale memristors repeatedly and reproducibly.Among various forms of memristors, oxide memristors outperform others by possessing the advantages of lower programming and computing energy, favorable scaling in cell size, [10,11,30] and CMOS-compatibility in materials and fabrication. This further benefits the energy and area efficiency by amortizing the costs of anolog to digital converters (ADC) required in the circuit.…”
mentioning
confidence: 99%
“…Among various forms of memristors, oxide memristors outperform others by possessing the advantages of lower programming and computing energy, favorable scaling in cell size, [10,11,30] and CMOS-compatibility in materials and fabrication. Recently, many reports demonstrated enouraging results using multiple-bits in HfO x , TaO x , and other oxide memristors for neuromorphic computing applications, [23][24][25]31,32] making these highly promising if CMOS-integrated nanoscale devices can be demonstrated wtih wide dynamic range and promising yield numbers.…”
mentioning
confidence: 99%
“…[6] Despite various switching mechanisms have been proposed and solidly confirmed, [7,8] of particular interest and importance is the ion migration-based filamentary mechanism that can ensure an enhanced performance as the device scaling down (Figure 1c). Excellent device miniaturization of <10 nm, [9,10] ultrafast operation speed of <1 ns, [11,12] and extreme switching endurance of >10 12 cycles [13] have been demonstrated in memristors with filamentary mechanism, in addition to their abundant storage media including oxides, nitrides, chalcogenides, polymers, and etc. [7,8] Room-temperature quantum conductance has also been found in these memristors when the size of conducting filaments is reduced down to atomic scale, [14][15][16] as schematically shown by the panels (ii) and (iii) in Figure 1c.…”
mentioning
confidence: 99%
“…[114] Theoretically, the cross-sectional area of filaments partially accounts for the minimum area of devices, as filaments laterally expand during penetrating through the active layer of memristive devices. Integration density is determined by lateral size of memristive devices.…”
Section: Integrationmentioning
confidence: 99%