MEMS 3-D Scan Mirror With SU-8 Membrane and Flexures for High NA Microscopy

Liu, Tianbo; Svidunovich, Aaron J.; Wollant, Benjamin C.; Dickensheets, David L.

doi:10.1109/jmems.2018.2845375

Cited by 7 publications

(6 citation statements)

References 47 publications

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“…An annular aperture is formed around the device to allow coaxial integration into the optical system. The mechanical properties of the mirror are summarized in Table 1 27 .…”

Section: Resultsmentioning

confidence: 99%

“…The fabrication process was described in detail by Liu et al 27 . An overview of the process is provided here.…”

Section: Methodsmentioning

confidence: 99%

“…Then, they were coated with metal to provide electrical connection. The successful fabrication of these vias relied on a new and simple technique that uses progressive via sizing to mitigate the notching at the silicon-to-buried-oxide interface 27,57 . After the completion of the TSVs, aluminum was evaporated onto the backside of the wafer and patterned to form the second part of the bilayer differential etch mask.…”

Section: Methodsmentioning

confidence: 99%

“…A biaxial MEMS scanner replaces two bulky galvanometer scanners and, potentially, a lens relay between them. A 3D MEMS scanner can realize focus control in addition to 2D lateral scanning via a tip/tilt/piston motion 21–24 , tip/tilt/curvature control 25–27 , or a combination 28 . This eliminates the need for motor-driven mechanical focusing and further reduces the instrument size.…”

Section: Introductionmentioning

confidence: 99%

“…An aplanatic hyperhemisphere increases the NA by n 2 , thereby allowing our instrument to operate with NA = 0.7. The 3D MEMS scan mirror that we employ is of the tip/tilt/curvature type, namely, it integrates focusing with a deformable mirror surface to control the wavefront curvature 27 . Compared to previous mirrors of this class 25,26 , this mirror is capable of at least 2.5 times the focus stroke and demonstrates a θD product (a measure of the lateral resolution) of 12 deg-mm (0 to peak), which represents an improvement by a factor of 3.4 relative to the earlier mirror 25 .…”

Section: Introductionmentioning

confidence: 99%

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MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

2019

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Laser scanning microscopes can be miniaturized for in vivo imaging by substituting optical microelectromechanical system (MEMS) devices in place of larger components. The emergence of multifunctional active optical devices can support further miniaturization beyond direct component replacement because those active devices enable diffraction-limited performance using simpler optical system designs. In this paper, we propose a catadioptric microscope objective lens that features an integrated MEMS device for performing biaxial scanning, axial focus adjustment, and control of spherical aberration. The MEMS-in-the-lens architecture incorporates a reflective MEMS scanner between a low-numerical-aperture back lens group and an aplanatic hyperhemisphere front refractive element to support high-numerical-aperture imaging. We implemented this new optical system using a recently developed hybrid polymer/silicon MEMS three-dimensional scan mirror that features an annular aperture that allows it to be coaxially aligned within the objective lens without the need for a beam splitter. The optical performance of the active catadioptric system is simulated and imaging of hard targets and human cheek cells is demonstrated with a confocal microscope that is based on the new objective lens design.

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“…An annular aperture is formed around the device to allow coaxial integration into the optical system. The mechanical properties of the mirror are summarized in Table 1 27 .…”

Section: Resultsmentioning

confidence: 99%

“…The fabrication process was described in detail by Liu et al 27 . An overview of the process is provided here.…”

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

2019

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Varifocal MEMS mirrors for high-speed axial focus scanning: a review

Pribošek,

Bainschab,

Sasaki

2023

Microsyst Nanoeng

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Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.

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A stainless-steel micro-scanner for rapid 3D confocal imaging

Oyman

Efe

Icel

et al. 2019

J. Phys. D: Appl. Phys.

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This paper summarizes the design, fabrication, and characterization of a magnetically actuated stainless-steel based micro-scanner. The out-of-plane deflection of the proposed device is calculated by using a custom depth scan setup. The main advantage of laser cutting technology, which is utilized in manufacturing the proposed steel scanner, is its rapid fabrication capability at low cost, while still offering high frequency scan for imaging and/or ablation with high frame-rates. In the lateral plane, the scanner delivers 5 degrees of total optical scan angle for a current drive of 60 mA for both slow scan and fast scan axes at 998 Hz and 2795 Hz, respectively. Furthermore, the device provides an out-of-plane pumping mode at 1723 Hz that could be utilized for axial scanning to create focal shift at the target. Fabricated scanner is integrated into a confocal microscopy setup and tested with a resolution target and a Convallaria rhizome sample, accomplishing a 240 µm × 240 µm field of view with 2.8 µm resolution. The device offers 218 µm depth of field (in tissue) and based on acquired resonance frequencies, we estimate rapid scanning of a three-dimensional block of tissue (240 µm × 240 µm × 218 µm size) with approximately 3 block per second with 50% fill rate and total coverage of 87% for 1 s scan. Finally, a custom setup is proposed for 3D imaging and validity of the 3D beam steering of the micro-scanner is tested.

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MEMS 3-D Scan Mirror With SU-8 Membrane and Flexures for High NA Microscopy

Cited by 7 publications

References 47 publications

MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

Varifocal MEMS mirrors for high-speed axial focus scanning: a review

A stainless-steel micro-scanner for rapid 3D confocal imaging

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