MEMS AC voltage reference for miniaturized instrumentation and metrology

Bounouh, Alexandre; Camon, Henri; Bélières, Denis; Blard, F.; Ziade, F.

doi:10.1016/j.csi.2010.06.007

Cited by 15 publications

(7 citation statements)

References 6 publications

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“…Taking this into account, the electrostatic force in (3) can be substituted with the mean value of the electrostatic force. This brings about (5). Note that = 2 / and in the steady state, around the pull-in point,̈anḋapproximate to zero.…”

Section: Operating Principlesmentioning

confidence: 99%

“…After Suhonen, many other researchers started to work on these voltage reference sources to improve their accuracy. Since the fabrication characteristics of MEMS tunable capacitor as the main element of MEMS-based voltage references are very critical, there are several papers which are focused on micromachining process of the MEMS tunable capacitors [2][3][4][5][6][7]. The main purpose of these works is to propose and fabricate new designs of microsized tunable capacitors and show the improvement of obtained MEMS-based voltage references.…”

Section: Introductionmentioning

confidence: 99%

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Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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The accuracy of physical parameters of a tunable MEMS capacitor, as the major part of MEMS AC voltage reference, is of great importance to achieve an accurate output voltage free of the malfunctioning noise and disturbance. Even though strenuous endeavors are made to fabricate MEMS tunable capacitors with desiderated accurate physical characteristics and ameliorate exactness of physical parameters' values, parametric uncertainties ineluctably emerge in fabrication process attributable to imperfections in micromachining process. First off, this paper considers applying an adaptive sliding mode controller design in the MEMS AC voltage reference source so that it is capable of giving off a well-regulated output voltage in defiance of jumbling parametric uncertainties in the plant dynamics and also aggravating external disturbance imposed on the system. Secondly, it puts an investigatory comparison with the designed model reference adaptive controller and the pole-placement state feedback one into one's prospective. Not only does the tuned adaptive sliding mode controller show remarkable robustness against slow parameter variation and external disturbance being compared to the pole-placement state feedback one, but also it immensely gets robust against the external disturbance in comparison with the conventional adaptive controller. The simulation results are promising.

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Section: Operating Principlesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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“…Several MEMS structures have been fabricated using silicon on insulator Multi-Project wafer process [6,7]. The structures are based on a silicon disk plate (movable membrane) featuring different configuration of the suspending springs on the substrate (fixed electrode) to ensure a controlled vertical piston mode motion.…”

Section: First Resultsmentioning

confidence: 99%

Development of a new technological MEMS process for AC voltage standards

et al. 2011

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This paper describes the development of a new technological process for manufacturing MEMS with out-of-plane motion in order to develop voltage references with high stability (deviation from the nominal value less than some 10 -6 per year) and working in alternating current (AC). In this application, the AC voltage reference is defined at the pull-in point of the MEMS variable capacitor made of two electrodes, one fixed and the other movable driven by an AC current having a frequency much higher than the mechanical resonant frequency. This process has been developed to get MEMS devices exhibiting high nominal capacitances, which makes the development of the read-out electronics easier, and metallized electrodes to avoid charge effects on the stability of the voltage standard. Moreover, this process allows to realize stoppers, in order to get a good operational reliability.

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“…Actually, the force in Equation (3) could be superseded by the electrostatic force mean value. This replacement brings about Equation (5). Notably, ω = 2π/T andẍ as well asẋ are nearly zero about the pull-in operation point at the steady state.…”

Section: Overview Of Operating Principlesmentioning

confidence: 95%

“…Other researchers began working on the VRS to ameliorate their preciseness. There are some papers which concentrate on micromachining procedures of MEMS tunable capacitors [2][3][4][5][6][7] because of the importance of the MEMS tunable capacitor fabrication specification as the major component of MEMS VRS. The dominant common target in these pieces is proposal and fabrication of novel schemes of tiny tunable capacitors as well as quality enhancement in the final fabricated MEMS VRS.…”

Section: Introductionmentioning

confidence: 99%

Robust adaptive sliding mode control of a MEMS tunable capacitor based on dead-zone method

2020

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Uncertainty in parameters of a tunable Micro Electro Mechanical System (MEMS) capacitor, as the main component of AC Voltage Reference Source (VRS), is significant to obtain a precise output voltage unaffected by disturbance and noise. Although attempts are done to craft the capacitor with desired physical specification and improve accuracy of parameters, parametric uncertainties transpire in manufacturing due to micro-machining shortcomings. First off, this paper remarks design of a Robust Adaptive Sliding Mode Controller (RASMC) and its application for the MEMS AC VRS for the first time so that it can produce a stable precise regulated output at presence of uncertainties and disturbance. Secondly, it makes a comparison between the proposed novel controller and our previously designed ASMC. The comparison reassures one of robustness at exacerbating conditions in the tunable capacitor dynamics. The novelty is employment of the dead zone-based ASMC to manage parametric uncertainty and disturbance in the MEMS tunable capacitor. It also contributes to adaptive sliding mode control of the dynamics with stiffness and damping coefficients, which are non-slowly-varying time-dependent parameters, approaching dead-zone method. Uncertainty in the plate mass besides bounded time-variant uncertainty in stiffness and damping are considered. These restrictions were not deemed in the previous design.

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MEMS AC voltage reference for miniaturized instrumentation and metrology

Cited by 15 publications

References 6 publications

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Development of a new technological MEMS process for AC voltage standards

Robust adaptive sliding mode control of a MEMS tunable capacitor based on dead-zone method

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