MEMS Accelerometer Noises Analysis Based on Triple Estimation Fractional Order Algorithm

Macias, Michał; Sierociuk, Dominik; Malesza, Wiktor

doi:10.3390/s22020527

Cited by 8 publications

(4 citation statements)

References 41 publications

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“…Motivated by the study of Macias et al [24], where it was shown that the accelerometer's noise of MPU9250 contains the fractional order behaviour, we decided to make a noise analysis of its three-axes gyroscope. We utilise the TEA with various approximation lengths during the estimation process.…”

Section: Identification and Analysis Of Mems Gyroscope's Noisesmentioning

confidence: 99%

“…In the study of Sierociuk and Macias [23], the triple estimation algorithm (TEA) for state vector, order and system parameters' estimation was proposed and described in detail. In the study of Macias et al [24], a triple estimation algorithm was used to carry out identification of fractional order noise in MEMS accelerometer measurements. In the practical application of the triple estimation algorithm, it was found that the algorithm requires quite a high numerical power.…”

Section: Introductionmentioning

confidence: 99%

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Finite Length Triple Estimation Algorithm and its Application to Gyroscope MEMS Noise Identification

Macias

Sierociuk

2023

Acta Mechanica Et Automatica

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The noises associated with MEMS measurements can significantly impact their accuracy. The noises characterised by random walk and bias instability errors strictly depend on temperature effects that are difficult to specify during direct measurements. Therefore, the paper aims to estimate the fractional noise dynamics of the stationary MEMS gyroscope based on finite length triple estimation algorithm (FLTEA). The paper deals with the state, order and parameter estimation of fractional order noises originating from the MEMS gyroscope, being part of the popular Inertial Measurement Unit denoted as SparkFun MPU9250. The noise measurements from x, y and z gyroscope axes are identified using a modified triple estimation algorithm (TEA) with finite approximation length. The TEA allows a simultaneous estimation of the state, order and parameter of fractional order systems. Moreover, as it is well-known that the number of samples in fractional difference approximations plays a key role, we try to show the influence of applying the TEA with various approximation length constraints on final estimation results. The validation of finite length TEA in the noise estimation process coming from MEMS gyroscope has been conducted for implementation length reduction achieving 50% of samples needed to estimate the noise with no implementation losses. Additionally, the capabilities of modified TEA in the analysis of fractional constant and variable order systems are confirmed in several numerical examples.

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Section: Identification and Analysis Of Mems Gyroscope's Noisesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Finite Length Triple Estimation Algorithm and its Application to Gyroscope MEMS Noise Identification

Macias

Sierociuk

2023

Acta Mechanica Et Automatica

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“…Microelectromechanical system (MEMS) accelerometers are the crucial inertial sensors that find extensive applications in fields such as inertial navigation [ 1 , 2 , 3 , 4 ], vibration measurement [ 5 , 6 , 7 ], medical diagnosis [ 8 , 9 , 10 ], health monitoring [ 11 , 12 , 13 ], and disaster warning [ 14 , 15 , 16 ]. Presently, there is a growing demand for MEMS accelerometers with small sizes, high sensitivity, and superior stability [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

A High-Sensitivity MEMS Accelerometer Using a Sc0.8Al0.2N-Based Four Beam Structure

Zhang

et al. 2023

Micromachines

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In this paper, a high-sensitivity microelectromechanical system (MEMS) piezoelectric accelerometer based on a Scandium-doped Aluminum Nitride (ScAlN) thin film is proposed. The primary structure of this accelerometer is a silicon proof mass fixed by four piezoelectric cantilever beams. In order to enhance the sensitivity of the accelerometer, the Sc0.2Al0.8N piezoelectric film is used in the device. The transverse piezoelectric coefficient d31 of the Sc0.2Al0.8N piezoelectric film is measured by the cantilever beam method and found to be −4.7661 pC/N, which is approximately two to three times greater than that of a pure AlN film. To further enhance the sensitivity of the accelerometer, the top electrodes are divided into inner and outer electrodes; then, the four piezoelectric cantilever beams can achieve a series connection by these inner and outer electrodes. Subsequently, theoretical and finite element models are established to analyze the effectiveness of the above structure. After fabricating the device, the measurement results demonstrate that the resonant frequency of the device is 7.24 kHz and the operating frequency is 56 Hz to 2360 Hz. At a frequency of 480 Hz, the sensitivity, minimum detectable acceleration, and resolution of the device are 2.448 mV/g, 1 mg, and 1 mg, respectively. The linearity of the accelerometer is good for accelerations less than 2 g. The proposed piezoelectric MEMS accelerometer has demonstrated high sensitivity and linearity, making it suitable for accurately detecting low-frequency vibrations.

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“…The issue is illustrated, for example, by publications analyzing transversely oscillating MEMS viscometers [ 45 ] or fractional-order arch MEMS resonators [ 46 , 47 ]. A number of papers focus on advanced control techniques that help to improve the stability and performance of fractional-order MEMS [ 45 , 46 , 47 , 48 , 49 ], which are implemented using the sliding mode or fractional-order controllers. Such units can then exhibit complex fractional-order dynamics.…”

Section: Introductionmentioning

confidence: 99%

Extended Higher-Order Elements with Frequency-Doubled Parameters: The Hysteresis Loops Are Always of Type II

Biolek

Biolková

et al. 2023

Sensors

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Current MEMS (Micro Electro Mechanical Systems) can be modeled by state-dependent elements that exhibit hysteretic behavior. Examples include capacitors and inductors whose capacitances and inductances are dependent on the instantaneous state of the electromechanical system, resistors whose resistances exhibit temperature changes when the elements are actually heated, etc. Regardless of the physical background, such hysteresis manifestations can be studied uniformly in the broader framework of generic and extended higher-order elements, in which a classification of hysteretic loops into types I and II is established. The loop type is an important dynamical parameter of an element, having the potential to indicate, for example, its (in)volatility. Thus far, there is no reliable criterion to determine the type of steady loop from the defining relations of an element. This work reports on one special class of extended elements that produces type II loops under all circumstances. The paper presents hitherto unpublished connections between the frequency-doubling parameters of an element and the type of its hysteresis loop. The new findings are expressed by several theorems that allow the type of hysteresis to be inferred from the frequency behavior of the element parameter or state, and vice versa. These procedures are demonstrated with examples and verified by computer simulations.

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MEMS Accelerometer Noises Analysis Based on Triple Estimation Fractional Order Algorithm

Cited by 8 publications

References 41 publications

Finite Length Triple Estimation Algorithm and its Application to Gyroscope MEMS Noise Identification

Finite Length Triple Estimation Algorithm and its Application to Gyroscope MEMS Noise Identification

A High-Sensitivity MEMS Accelerometer Using a Sc0.8Al0.2N-Based Four Beam Structure

Extended Higher-Order Elements with Frequency-Doubled Parameters: The Hysteresis Loops Are Always of Type II

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