MEMS analog light processing: an enabling technology for adaptive optical phase control

Gehner, Andreas; Wildenhain, Michael; Neumann, Hannes; Knobbe, Jens; Komenda, Ondrej

doi:10.1117/12.651731

Cited by 17 publications

(12 citation statements)

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“…Effective pulse compression and THz pulse train generation were proven (see [29]). Further, the device can serve as programmable DOE (see [29]). …”

Section: Further Applications: Laser Pulse Shaping and Programmable Doementioning

confidence: 99%

The high versatility of silicon based micro-optical modulators

Schenk

2009

SPIE Proceedings

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"One product, one process": This MEMS law is true for micro-optical modulators, too and thus puts a high load on every product and technology development team. On the other hand the law expresses nothing but the high versatility of the underlying usually silicon based technology. A huge variety of applications where an electromagnetic wave experiences a spatial-temporal modulation makes use of this technology: High resolution as well as ultra-compact displays, optical switches in telecommunication as well as data storage devices, spectrometers e. g. for quality control, as well as adaptive optics and pattern generation to mention only a few. The applications completely differ with regard to the requirements in almost all aspects. The most important drivers to use silicon based micro-optical modulators are high accuracy, high bandwidth and high miniaturization. A continuous further development of the technology can be reported. Novel optical, mechanical and electrical working principles are investigated to meet future requirements. After a short overview of the most typical applications of silicon based micro-optical modulators the high versatility of this technology is detailed by means of selected devices and applications. Single 1D and 2D micro mirrors with diameters of up to 4 mm e. g. for projection, imaging and spectroscopy are as well presented and discussed as micro mirror arrays comprising up to 1 million analog deflectable mirrors for image generation and phase modulation in microlithography and adaptive optics

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“…Effective pulse compression and THz pulse train generation were proven (see [29]). Further, the device can serve as programmable DOE (see [29]). …”

Section: Further Applications: Laser Pulse Shaping and Programmable Doementioning

confidence: 99%

The high versatility of silicon based micro-optical modulators

Schenk

2009

SPIE Proceedings

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“…Recently, MEMS micromachining also initiated a pioneering approach to create programmable diffractive optical elements on the basis of micromechanical mirror arrays (MMAs). Two successful MMA actuator principles emerged in different fields of application -piston mirror arrays for adaptive optics [3], and torsion mirror arrays for deep UV microlithography [4,5]. They are examples of flexible diffractive components.…”

Section: Introductionmentioning

confidence: 99%

Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range

et al. 2010

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A new generation of micromirror arrays (MMAs) with torsional actuators is being developed within the European research project MEMI in order to extend the usable spectral range of diffractive MMAs from deep ultraviolet into the visible and near infrared. The MMAs have 256 x 256 pixels reaching deflections above 350 nm at a frame rate of 1 kHz, which enables an operation in the target wavelength range between 240 nm and 800 nm. Customized driver electronics facilitates computer controlled operation and simple integration of the MMA into various optical setups. Tests in the visible wavelength range demonstrate the functionality and the high application potential of first MMA test samples

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“…Therewith, devices with an unprecedented high spatial resolution and precision may be realized providing an excellent reproduction capability especially for complex higher order aberrations. For that reason, the Fraunhofer IPMS has developed a high-resolution fine segmented MEMS micro mirror array together with an underlying integrated active-matrix CMOS address circuitry [4,5]. The device provides 240 x 200 piston-type mirror elements with 40 µm pixel size.…”

Section: Introductionmentioning

confidence: 99%

AO SLM demonstration system and test bed

et al. 2007

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In order to demonstrate and to quantitatively evaluate the wavefront correction capabilities of a spatial light modulator (SLM) for optical imaging enhancement in Adaptive Optics (AO) a compact and flexible demonstration system and test bed has been developed. It basically consists of a projection system, where image objects of different complexity and spatial resolution can be implemented and imaged through Adaptive Optics onto a CCD camera. Furthermore, static and dynamic wavefront errors of different severeness can be introduced by means of fixed and rotating phase plates. With this system for the first time the optical performance of the Fraunhofer IPMS 240 x 200 micro mirror SLM for highresolution wavefront control has been characterized. For an incoherent or partially coherent imaging as employed in this case the image quality normally is assessed in terms of the Modulation Transfer Function (MTF). Therefore, a quantitative evaluation has been carried out by measuring the system MTF including the SLM for a number of spatial frequencies as well as for a variety of different complex aberrations without and with applied correction. Besides a description of the system set-up the obtained results on the imaging improvement and MTF measurement are presented

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MEMS analog light processing: an enabling technology for adaptive optical phase control

Cited by 17 publications

References 0 publications

The high versatility of silicon based micro-optical modulators

The high versatility of silicon based micro-optical modulators

Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range

AO SLM demonstration system and test bed

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