MEMS-Based 180$^{\circ}$ Phase Switch for Differential Radiometers

MEMS Sensors - Design and Application

“…Again, by controlling the values of Z A and Z B by means of MEMS switches, the amount of energy transfer among modes can be controlled. This transition and other described in [38][39][40] are the base for building multimodal uniplanar reconigurable circuits [6,[9][10][11]58] using MEMS switches.…”

“…Radio frequency microelectromechanical system (RF-MEMS) switches are aimed to perform the control function in tunable and reconigurable RF/microwave and millimeter-wave (mmwave) systems. Electrostatic actuation is often preferred to other actuation mechanisms like electrothermal [1,2] and phase-change/phase-transition materials [3], due to its negligible current consumption, no requirement for external heating sources and integration capability with well-established technologies such as high-resistivity silicon [4][5][6][7], fused-quarz and glass substrates [8][9][10][11], or CMOS [12][13][14][15] and SiGe BiCMOS [16,17] processes. The later can provide totally integrated, eicient systems containing sensors, control electronics, and MEMS-reconigurable RF communication circuits [18].…”

“…Moreover, suitable equivalent circuits for both (ON/OFF) states of the switch can be obtained and integrated in the multimodal models. In this way, eicient and compact reconigurable circuits for communication systems at microwave and mm-wave frequencies can be designed [6,[9][10][11].…”

RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters

“…The presence of two fundamental modes in the same CPW section allows the design of innovative compact reconfigurable microwave circuits since more circuit functionality can be assembled in less area. This multimodal approach has already been applied by the authors to the design of 90º-hybrids (Llamas et al 2009) compact bandpass filters ) and also RF-MEMS enabled reconfigurable devices, such as phase switches (Llamas et al 2010; and bandpass filters with reconfiguration of centerfrequency (Contreras et al 2014) or bandwidth . RF-MEMS switches offer a simple yet effective solution to provide reconfiguration in multimodal circuits since these require a selective control of each CPW mode (even (Llamas et al 2010; and odd , which can be accomplished only in particular cases using semiconductor switches (Contreras et al 2011).…”

“…This multimodal approach has already been applied by the authors to the design of 90º-hybrids (Llamas et al 2009) compact bandpass filters ) and also RF-MEMS enabled reconfigurable devices, such as phase switches (Llamas et al 2010; and bandpass filters with reconfiguration of centerfrequency (Contreras et al 2014) or bandwidth . RF-MEMS switches offer a simple yet effective solution to provide reconfiguration in multimodal circuits since these require a selective control of each CPW mode (even (Llamas et al 2010; and odd , which can be accomplished only in particular cases using semiconductor switches (Contreras et al 2011). Uniplanar topologies using a single-mode (even mode only) classical design approach have also been extensively reported in the literature to implement a variety of MEMS-reconfigurable RF and microwave devices, in particular phase shifters (Van Caekenberghe et al 2008) and filters (Nordquist et al 2004;Fourn et al 2003;Ocera et al 2006;Pothier et al 2005;Yuk et al 2012;Park et al 2006;Nordquist et al 2005;Reines eut al.…”