MEMS-based confocal laser scanning fluorescence microscopy for tumor demarcation in oncological surgery

Reinig, Peter; Dallmann, Hans-Georg; Schwarzenberg, Markus; Ziebarth, Johannes; Knobbe, Jens; Junek, Jirí; Herbst, Rudolf; Rathert, Julian; Gerlach, Rüdiger; Blache, Ulrich; Tretbar, Sandy; Stephan, Frank

doi:10.1117/12.2608547

Cited by 1 publication

(1 citation statement)

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“…For the quasi-static actuated scan axes high position accuracy and repeatability of the scan trajectory is guaranteed despite the high quality factor (Q ≈ 100) of the vibratable MEMS scanner by using a flatness-based MEMS driving control with jerk-limited trajectory design 7 . An actual application of a fast 2D raster scanning mirror is a MEMS-based confocal laser scanning fluorescence microscope for tumor demarcation in oncological surgery 3 .…”

Section: Introductionmentioning

confidence: 99%

2D MEMS vector scanning mirrors for LIDAR, medical imaging, and high laser power applications

Sandner

Mustin

Birnbaum

et al. 2023

MOEMS and Miniaturized Systems XXII

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Miniaturized vectorial beam steering mirrors are required in numerous applications like (i) LIDAR, (ii) diagnostic imaging or (iii) miniaturized therapeutic laser systems. To increase simultaneously static tilt angle (≥ ±5°) and mirror aperture (≥ 3mm) electro-dynamic driven MEMS vector scanners, actuated by moving magnet drives, were developed. Here, Fraunhofer IPMS uses a hybrid MEMS concept combining its experience in the fabrication of monolithic silicon 2D MEMS scanning mirrors with existing know-how in MEMS micro-assembly technologies. Two designs of electro-magnetic driven vectorial 2D MEMS scanners are presented, (i) a non-gimbaled 2D vector scanner with 8 mm mirror aperture and ≥ ±2° quasi-static tilt angle and (ii) a 2D vector scanner with gimble suspended moving magnet drive. The gimbaled electro-magnetic MEMS scanner has a 5 mm large aperture and enables large quasi-static tilt angles of ±13° on both scan axis. Eigenfrequencies are 142 Hz (X) and 124 Hz (Y) allowing non-resonant vectorial scanning with speeds up to 100…400°/s. A step response time < 10 ms is achieved in closed loop control for both axes. This hybrid electro-magnetic MEMS approach significantly expands the parameter space of the previous monolithic electro-static scanners.

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Section: Introductionmentioning

confidence: 99%