MEMS-Based Corrosion and Stress Sensors for Non-Destructive Structural Evaluation

Abstract

TX 75083-3836, U.S.A., fax 01-972-952-9435. AbstractA system utilizing multiple types of microsensors for monitoring corrosion, fatigue, and failure in high value structures is described. Non-destructive evaluation (NDE) techniques enabled through microelectromechanical systems (MEMS) sensor approaches allow monitoring of the occurrence and rate of corrosion under sealants coated (painted) surfaces and other inaccessible areas. Using MEMS technology it is now possible to integrate and package sensors with associated CMOS control circuitry onto a single semiconductor chip. These sensors can provide information on the presence of stress, fatigue, corrosion, and micro-crack formation in structures being monitored. This combination of data provides critical assessment of structural health, leading to predictions of failure occurring. Two types of sensor devices will be discussed, along with results from specific applications.