MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid

Ninomiya, T.; Okayama, Yoshiyuki; Matsumoto, Yasuaki; Arouette, Xavier; Osawa, Kouhei; Miki, Norihisa

doi:10.1016/j.sna.2009.07.002

Cited by 60 publications

(49 citation statements)

References 12 publications

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“…Okayama et al proposed a bonding method that is performed in a liquid to avoid encapsulation of air bubbles in the devices, which causes fabricated devices to have non-uniform characteristics (Okayama et al, 2010). Ninomiya et al used this method to fabricate a displacement amplification mechanism for a piezo actuator and developed a tactile display and a micro pump with this mechanism (Ninomiya et al 2011). Liquid injection through channels has also been used for liquid encapsulation (Kim et al, 2008 andChossat et al, 2013).…”

Section: Introductionmentioning

confidence: 99%

Stiffness-tunable device encapsulating magnetorheological fluids in a thin flexible polymer structure

Ishizuka

Miki

2018

Mechanical Engineering Journal

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We herein propose a liquid encapsulation method for a submillimeter-size polydimethylsiloxane (PDMS) membrane. We selected a magnetorheological (MR) fluid as the liquid to be encapsulated in the membrane, the stiffness of which is tuned by an external magnetic field. The proposed method consists of two steps. First, a PDMS bump was made to contact a MR fluid, and a MR fluid droplet was formed on top of the bump. Next, the droplet was dipped in a PDMS casting solution and fully covered with a PDMS casting solution layer. Finally, the droplet was encapsulated in the membrane after curing. We experimentally confirmed that the radius of the PDMS bump and the viscosity of the MR fluid were variable parameters that could determine the height of the structure. We also evaluated the stiffness characteristics of the structure. The calculated Young's modulus indicated that the stiffness varied from 70 kPa to 180 kPa in the presence of an external magnetic field. The results indicated that the structure could emulate relatively soft materials and could be applied to a tactile display used in palpation.

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Section: Introductionmentioning

confidence: 99%

Stiffness-tunable device encapsulating magnetorheological fluids in a thin flexible polymer structure

Ishizuka

Miki

2018

Mechanical Engineering Journal

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“…[8][9][10][11] In order to obtain the structure with large displacement and small size, the micro-valves based on piezoelectric and hydraulic amplification mechanism have been presented. T. Ninomiya et al 12 and X. Arouette et al 13 reported hydraulic amplification mechanism that sealed in a microcavity by two largely deformable polydimethylsiloxane (PDMS) membranes, which has excellent performance in the amplification effect and dynamic characteristics and can be used as micro-valve driving actuator. But it uses PDMS membranes with high elastic as piston, which makes the piston itself produce large deformation under force.…”

Section: Introductionmentioning

confidence: 99%

A normally-closed piezoelectric micro-valve with flexible stopper

et al. 2016

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In the field of controlled drug delivery system, there are still many problems on those reported micro-valves, such as the small opening height, unsatisfactory particle tolerance and high cost. To solve the above problems, a novel normally-closed piezoelectric micro-valve is presented in this paper. The micro-valve was driven by circular unimorph piezoelectric vibrator and natural rubber membrane with high elasticity was used as the valve stopper. The small axial displacement of piezoelectric vibrator can be converted into a large stroke of valve stopper based on hydraulic amplification mechanism. The experiment indicates that maximum hydraulic amplification ratio is up to 14, and the cut-off pressure of the micro-valve is 39kPa in the case of no working voltage. The presented micro valve has a large flow control range (ranging from 0 to 8.75mL/min).

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“…Because tactile display requires the actuator which can drive with high frequency, large displacement and high density due to the characteristics of human tactile receptors [5][6][7][8]. Then, we developed large displacement MEMS actuator which can implement these required conditions [9][10].…”

Section: Introductionmentioning

confidence: 99%

Quantitative analysis of surface textures created by MEMS tactile display using microfabricated tactile samples

Kosemura

Hasegawa

Ishikawa

et al. 2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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This paper reports quantification of virtual surface textures produced by the MEMS_based tactile display. Tactile display consists of large displacement MEMS actuator array which is composed of piezoelectric actuators and hydraulic displacement amplification mechanism (HDAM) for large displacement to stimulate human tactile receptors. Tactile display can provide various surface textures such as "rough" "soft" "elastic" etc. to fingertip by controlling the voltages, the vibration frequencies and the time of actuator's driving time. In previous work, we proved that tactile display could create smooth and rough textures by controlling the actuator's parameters. In this study, to quantify tactile feelings virtually produced by the MEMS tactile display, we newly propose "Sample comparison method". In this method, subjects require to compare between the virtual surface texture and tactile samples and select the sample most similar to displayed tactile feeling. In this paper, we firstly conducted comparing experiment using unprocessed samples to investigate what kind of surface characteristics can be controlled on the tactile display. Then, we experimented using microfabricated tactile samples to quantify the tactile feelings. At last,we successfully show the specific characteristics of surfaces virtually created by the MEMS tactile display.

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MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid

Cited by 60 publications

References 12 publications

Stiffness-tunable device encapsulating magnetorheological fluids in a thin flexible polymer structure

Stiffness-tunable device encapsulating magnetorheological fluids in a thin flexible polymer structure

A normally-closed piezoelectric micro-valve with flexible stopper

Quantitative analysis of surface textures created by MEMS tactile display using microfabricated tactile samples

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