MEMS-based laser scanning microscope for endoscopic use

Abstract

A miniaturized MEMS scanning microscope is presented, which enables endoscopic imaging for medical, biological and technical purposes. It consists of an optical head of only 8 mm diameter that is coupled via optical fibers and wires to a distant unit containing optics and electronics for microscope control and data processing. A PC or notebook is completing the system, acting as user interface, image display and storage. The microscope uses a focused flying laser spot allowing a resolution of about 15 um within the focus plane. This enables new endoscopic applications as in-vivo investigation of cancer-suspicious tissues in medicine

Analysis of Error Sources in the Lissajous Scanning Trajectory Based on Two-Dimensional MEMS Mirrors

“…Within the platform, the measurement and control unit generated the drive signals for the MEMS mirror, consisting of the voltage generation circuit, the bias conditioning circuit, the high-voltage amplifier circuit, and the low-pass filter circuit [29][30][31][32]. Due to asymmetry in the circuit parameters and frequency characteristics, the measured drive signals deviated from the theoretical signals, particularly in the amplitude and phase.…”