MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever

Nguyen, Thanh-Vinh; Mizuki, Yuya; Tsukagoshi, Takuya; Takahata, Tomoyuki; Ichiki, Masaaki; Shimoyama, Isao

doi:10.3390/s20041052

Cited by 35 publications

(25 citation statements)

References 36 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The authors are aware that there exist many different sensor technologies to measure the human pulse wave, ranging from optic 57 , 58 over ultrasonic 59 to force 20 , 54 , 55 , 60 – 65 sensing approaches. The force-sensing approaches make use of piezoresistive 60 , 61 , piezoelectric 54 , 55 or triboelectric 62 effects, or of capacitive changes 20 , 63 – 65 . Many of those devices are impressive with respect to their high sensitivity and ultrafast response time; for instance, Yao et al recently reported a piezoresistive sensor with an impressive sensitivity >10 7 Ω kPa −1 and a fast response time of 1.6 ms 60 .…”

Section: Resultsmentioning

confidence: 99%

Imperceptible energy harvesting device and biomedical sensor based on ultraflexible ferroelectric transducers and organic diodes

et al. 2021

View full text Add to dashboard Cite

Energy autonomy and conformability are essential elements in the next generation of wearable and flexible electronics for healthcare, robotics and cyber-physical systems. This study presents ferroelectric polymer transducers and organic diodes for imperceptible sensing and energy harvesting systems, which are integrated on ultrathin (1-µm) substrates, thus imparting them with excellent flexibility. Simulations show that the sensitivity of ultraflexible ferroelectric polymer transducers is strongly enhanced by using an ultrathin substrate, which allows the mounting on 3D-shaped objects and the stacking in multiple layers. Indeed, ultraflexible ferroelectric polymer transducers have improved sensitivity to strain and pressure, fast response and excellent mechanical stability, thus forming imperceptible wireless e-health patches for precise pulse and blood pressure monitoring. For harvesting biomechanical energy, the transducers are combined with rectifiers based on ultraflexible organic diodes thus comprising an imperceptible, 2.5-µm thin, energy harvesting device with an excellent peak power density of 3 mW·cm−3.

show abstract

Section: Resultsmentioning

confidence: 99%

Imperceptible energy harvesting device and biomedical sensor based on ultraflexible ferroelectric transducers and organic diodes

et al. 2021

View full text Add to dashboard Cite

show abstract

“…Another study has been carried out for designing a pulse wave measurement method using a MEMS cantilever based sensor [147]. The design has a thin piezoresistive cantilever of a thickness of 300-nm as a membrane inside the air chamber of sensors.…”

Section: Pulse Oximetermentioning

confidence: 99%

MEMS Sensors for Diagnostics and Treatment in the Fight Against COVID-19 and Other Pandemics

et al. 2021

View full text Add to dashboard Cite

As the world is going through an existential global health crisis, i.e., the outbreak of novel coronavirus-caused respiratory disease , the healthcare systems of all the countries require readily available, low cost and highly precise equipment for the rapid diagnostics, monitoring, and treatment of the disease. The performance and precision of this equipment are solely dependent on the sensors being used. The advancement in research and development of micro-electro-mechanical systems (MEMS) based sensors during recent years, has resulted in the improvement of the conventional equipment being used in biomedical and health care applications. Microfluidics (Lab-on-a-chip) and MEMS sensors are now being used extensively for quick and accurate detection, progression monitoring, and treatment of various diseases including Covid-19. The ongoing miniaturization and design improvements have resulted in more precise sensors and actuators for healthcare applications, even for micro and nanoscale measurements in drug delivery and other invasive applications. This article aims at reviewing the MEMS sensors being used or which can be used in the important equipment for the detection and treatment of Covid-19 or other pandemics. An insight into various designs and working principles of the research-based and commercially available MEMS sensors is presented. The study highlights the role and importance of MEMS sensors in the improvement of equipment with conventional sensors. MEMS sensors outperform the conventional sensors due to their small size (1µm-1mm), negligible weight, prompt response, precise measurements, portability, and ease of integration with electronic circuitry.

show abstract

“…The sponge pad was used to prevent the air chamber from remaining collapsed due to the sticking of the film to the tape. Finally, the substrate on which the cantilever chip was mounted was attached to the back side of the tape with the To calibrate the cantilever, we applied differential pressure in the range of ±3 Pa to the cantilever and measured the fractional resistance change of the cantilever using a setup described in previous papers [13,14]. The calibration results in Figure 2c clearly show that the fractional resistance change of the cantilever ∆R/R is proportional to the applied differential pressure ∆P.…”

Section: Sensor Devicementioning

confidence: 99%

“…In this study, we used a 200-nm-thick piezoresistive cantilever [ 13 , 14 , 15 , 16 ] as the pressure sensing element. Figure 2 a shows a photograph of the fabricated cantilever and its design parameters.…”

Section: Sensor Fabricationmentioning

confidence: 99%

Mask-Type Sensor for Pulse Wave and Respiration Measurements and Eye Blink Detection

Nguyen

Ichiki

2021

Sensors

Self Cite

View full text Add to dashboard Cite

This paper reports on a mask-type sensor for simultaneous pulse wave and respiration measurements and eye blink detection that uses only one sensing element. In the proposed sensor, a flexible air bag-shaped chamber whose inner pressure change can be measured by a microelectromechanical system-based piezoresistive cantilever was used as the sensing element. The air bag-shaped chamber is fabricated by wrapping a sponge pad with plastic film and polyimide tape. The polyimide tape has a hole to which the substrate with the piezoresistive cantilever adheres. By attaching the sensor device to a mask where it contacts the nose of the subject, the sensor can detect the pulses and eye blinks of the subject by detecting the vibration and displacement of the nose skin caused by these physiological parameters. Moreover, the respiration of the subject causes pressure changes in the space between the mask and the face of the subject as well as slight vibrations of the mask. Therefore, information about the respiration of the subject can be extracted from the sensor signal using either the low-frequency component (<1 Hz) or the high-frequency component (>100 Hz). This paper describes the sensor fabrication and provides demonstrations of the pulse wave and respiration measurements as well as eye blink detection using the fabricated sensor.

show abstract

MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever

Cited by 35 publications

References 36 publications

Imperceptible energy harvesting device and biomedical sensor based on ultraflexible ferroelectric transducers and organic diodes

Imperceptible energy harvesting device and biomedical sensor based on ultraflexible ferroelectric transducers and organic diodes

MEMS Sensors for Diagnostics and Treatment in the Fight Against COVID-19 and Other Pandemics

Mask-Type Sensor for Pulse Wave and Respiration Measurements and Eye Blink Detection

Contact Info

Product

Resources

About