16th International Workshop on Physics of Semiconductor Devices 2012
DOI: 10.1117/12.925268
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MEMS deformable mirrors: technology and applications

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“…Then, influence function of every actuator are calculated out. If all the actuators are at (x 0 , y 0 ) at first, and the influence function is F 0 (x, y), the final influence function of ith actuator could be written as equation (5), where (x i , y i ) is the final position of the ith actuator.…”
Section: Step 4 Influence Function Calculationmentioning
confidence: 99%
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“…Then, influence function of every actuator are calculated out. If all the actuators are at (x 0 , y 0 ) at first, and the influence function is F 0 (x, y), the final influence function of ith actuator could be written as equation (5), where (x i , y i ) is the final position of the ith actuator.…”
Section: Step 4 Influence Function Calculationmentioning
confidence: 99%
“…A glass-mirror and piezoelectric-actuator DM (PZT DM) [4] is the most suitable one in high power laser as its high damage threshold and large stroke compared to MEMS DM [5,6], membrane DM [7,8] and bimorph/unimorph DM [9,10]. For a PZT DM, the number of actuators is an important factor that should be concerned to achieve better correction ability.…”
Section: Introductionmentioning
confidence: 99%