MEMS for Photonic Integrated Circuits

Errando-Herranz, Carlos; Takabayashi, Alain Yuji; Edinger, Pierre; Sattari, Hamed; Gylfason, Kristinn B.; Quack, Niels

doi:10.1109/jstqe.2019.2943384

Cited by 109 publications

(85 citation statements)

References 117 publications

(156 reference statements)

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“…Due to the strong mechanical-optical interaction, shorter propagation lengths are required, and compact devices can be conceived. Additionally, photonic MEMS devices can be made latchable, which enables low-power programmable photonic circuits [6]. Compact silicon photonic MEMS directional couplers have been demonstrated before [7].…”

mentioning

confidence: 99%

Compact broadband suspended silicon photonic directional coupler

Sattari¹,

Takabayashi²,

Verheyen³

et al. 2020

Opt. Lett.

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Directional couplers are extensively used in photonic integrated circuits as basic components for efficient on-chip photonic signal routing. Conventionally, directional couplers are fully encapsulated in the technology’s waveguide cladding material. In this Letter, we demonstrate a compact broadband directional coupler, fully suspended in air and exhibiting efficient power coupling in the cross state. The coupler is designed and built based on IMEC’s iSiPP50G standard platform, and hydrofluoric (HF) vapor-etching-based post-processing allows to release the freestanding component. A low insertion loss of 0.5 dB at λ = 1560 n m and a 1 dB bandwidth of 35 nm at λ = 1550 n m have been confirmed experimentally. With a small footprint of 20 µ m × 30 µ m and high mechanical stability, this directional coupler can serve as a basic building block for large-scale silicon photonic microelectromechanical systems (MEMS) circuits.

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confidence: 99%

Compact broadband suspended silicon photonic directional coupler

Sattari¹,

Takabayashi²,

Verheyen³

et al. 2020

Opt. Lett.

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“…On the other hand, phase shifter III reaches a lower phase shift of 0.4π, but has a very low and stable IL. All devices show improved performance compared to previous results [2][3][4][5], but the trade-offs can be used to target specific scaling, which can be footprint or IL limited [5]. Device II, for instance, offers very good balance in scaling figures: linear, π phase shift with 20 V and 0.2 dB IL.…”

Section: Measurementsmentioning

confidence: 83%

Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

Edinger

Errando-Herranz

Takabayashi

et al. 2020

Conference on Lasers and Electro-Optics

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“…This tuning can be slow and is only needed to compensate static or slowly-varying phase errors. Lowpower techniques such as liquid-crystal [31], piezo-electric effects [32] or MEMS [33], [34] could be suitable.…”

Section: A Phase Errorsmentioning

confidence: 99%

A 2D Pixelated Optical Beam Scanner Controlled by the Laser Wavelength

Bogaerts

Dwivedi

Jansen

et al. 2021

IEEE J. Select. Topics Quantum Electron.

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We present a chip-based optical beam scanner based on a dispersive optical phased array (OPA) that illuminates the far field with a pixelated pattern. To scale up the OPA to a large number of antennas, we break it up into manageable blocks with acceptable losses. The 2D wavelength scanning within a block is handled by dispersive delay lines. Between blocks, there are no delay lines, and the OPA will only have constructive interference for a discrete set of wavelengths. This results in the far-field illumination of a pixelated pattern along both x and y directions. The sidelobes and the power in the main lobe can be controlled by the power distribution of the individual OPA antennas.

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MEMS for Photonic Integrated Circuits

Abstract: This is the accepted version of a paper published in. This paper has been peer-reviewed but does not include the final publisher proof-corrections or journal pagination.

Cited by 109 publications

References 117 publications

Compact broadband suspended silicon photonic directional coupler

Compact broadband suspended silicon photonic directional coupler

Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

A 2D Pixelated Optical Beam Scanner Controlled by the Laser Wavelength

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