MEMS magnetic field sensor based on magnetoelectric composites

Marauska, Stephan; Jahns, Robert; Greve, Henry; Quandt, Eckhard; Knöchel, R.; Wagner, Bernhard

doi:10.1088/0960-1317/22/6/065024

Cited by 141 publications

(73 citation statements)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In all calculations the FeCoBSi-AlN-Si system is used, which has been extensively investigated experimentally. [10][11][12]39 If the stoichiometry of the amorphous MS-phase is kept constant, thickness independent piezomagnetic properties are expected down to 2 nm, where magnetic interface effects set in. 40 The piezoelectric coefficients of hexagonal wurtzite structure AlN layers were found to decrease below about 500 nm layer thickness.…”

Section: Resultsmentioning

confidence: 99%

“…1). [9][10][11][12][13] The magnetoelectric effect in a nanocomposite of magnetostrictive (MS) and piezoelectric (PE) materials results (in macroscopic models) as a product of the individual material properties via stress-mediated coupling. [14][15][16][17][18] Layered composites, particles, and columns in a matrix approaches with different field orientations as excitation modes have been pursued as static or dynamic ME-sensors.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Theory of magnetoelectric effect in multilayer nanocomposites on a substrate: Resonant bending-mode response

Krantz

Gerken

2013

AIP Advances

View full text Add to dashboard Cite

Resonant bending-mode magnetoelectric (ME) coefficients of magnetostrictive-piezoelectric multilayer cantilevers are calculated analytically using a model developed for arbitrary multilayers on a substrate. Without quality factor effects the ME coefficient maxima in the four-dimensional parameter space of layer numbers, layer sequences, piezoelectric volume fractions, and substrate thicknesses are found to be essentially constant for nonzero substrate thickness. Global maxima occur for bilayers without substrates. Vanishing magnetoelectric response regions result from voltage cancellation in piezoelectric layers or absence of bending-mode excitation. They are determined by the neutral plane position in the multilayer stack. With Q-factor effects dominated by viscous air damping ME coefficients strongly increase with cantilever thickness primarily due to increasing resonance frequencies. The results yield a layer specific prediction of ME coefficients, resonance frequencies, and Q-factors in arbitrary multilayers and thus distinction of linear-coupling and Q-factor effects from exchange interaction, interface, or nonlinear ME effects

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Theory of magnetoelectric effect in multilayer nanocomposites on a substrate: Resonant bending-mode response

Krantz

Gerken

2013

AIP Advances

View full text Add to dashboard Cite

show abstract

“…Although a high ME coefficient of 737 V/cmOe was recently reported in thin film cantilever-type AlN/ FeCoSiB ME heterostructure at the EMR frequency, the low voltage from thin AlN film and the parasitic capacities cause significant magnetic noise density and low magnetic field sensitivity. 8,9 In addition to the difficulty in miniaturization of ME laminates, it turns out very challenging in sensing weak DC and low frequency ( f <1 Hz) magnetic fields for both ME bulk laminates and film stacks due to the fast raising 1/f noise. 10 All these difficulties can be attributed to the detection mechanism, i.e.…”

Section: Introductionmentioning

confidence: 99%

Theoretical investigation of magnetoelectric surface acoustic wave characteristics of ZnO/Metglas layered composite

Huang¹,

Lyu²,

Wen³

et al. 2016

AIP Advances

View full text Add to dashboard Cite

The surface acoustic wave properties of piezoelectric/magnetostrictive layered structures consisting of insulating ZnO and metallic Metglas with giant Δ E effect were studied based on a stable scattering matrix method. Only the first Rayleigh mode was found with phase velocity between 2200 m/s and 2650 m/s, and the maximum electro-mechanical coupling coefficient about 1%. It was found that the center frequency of ZnO/Metglas is highly sensitive on the change of magnetic field, up to 440 MHz/Oe. However, there is a cutoff Young’s modulus of Metglas for different designs of SAW, below which the Rayleigh mode will disappear. For a magnetoelectric SAW design with the center frequency of 335 MHz and covering a full magnetic field range from -1.4 to +1.4 Oe, the frequency sensitivity is 212 MHz/Oe, equivalent to a magnetic field sensitivity of 5 × 10−12 Tesla. Unlike conventional magnetoelectric bulk laminates or film stacks, the detection of frequency shift instead of electrical charge allows not only shrinkage of device volume but also a broad frequency band detection of weak magnetic field.

show abstract

“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16] The magneto-electric (ME) effect is studied by subjecting the composite to a magnetic or an electric field. The sample response to magnetic fields, termed direct ME-effect, could be studied by applying a magnetic bias field H and an ac magnetic field (dH) and measuring the resulting electric field dE.…”

Section: Introductionmentioning

confidence: 99%

Magneto-electric interactions at bending resonance in an asymmetric multiferroic composite: Theory and experiment on the influence of electrode position

Sreenivasulu

Петров

et al. 2015

Journal of Applied Physics

View full text Add to dashboard Cite

In magnetostrictive-piezoelectric bilayers the strength of mechanical strain mediated magneto-electric (ME) interactions shows a resonance enhancement at bending modes. Such composites when operating under frequency modulation at bending resonance have very high ME sensitivity and are of importance for ultrasensitive magnetometers. This report provides an avenue for further enhancement in the ME sensitivity by strategic positioning of the electrodes in the bilayer. We discuss the theory and measurements on the dependence of ME coupling on the position of electrodes in a lead zirconate titanate-permendur bilayer. Samples of effective length L with full electrodes and partial electrodes of length l ¼ L/3 are studied. A five-fold increase in ME voltage coefficient (MEVC) at bending resonance and a 75% increase in low-frequency MEVC are measured as the partial electrode position is moved from the free-end to clamped-end of the bilayer. When the partial electrode is close to the clamped end, the low-frequency and resonance MEVC are 22% and 45% higher, respectively, than for fully electroded bilayer. According to the model discussed here these observations could be attributed to non-uniform stress along the sample length under flexural deformation. Such deformations are stronger at the free-end than at the clamped-end, thereby reducing the stress produced by applied magnetic fields and a reduction in MEVC. Estimates of MEVC are in good agreement with the data. V C 2015 AIP Publishing LLC. [http://dx.

show abstract

MEMS magnetic field sensor based on magnetoelectric composites

Cited by 141 publications

References 22 publications

Theory of magnetoelectric effect in multilayer nanocomposites on a substrate: Resonant bending-mode response

Theory of magnetoelectric effect in multilayer nanocomposites on a substrate: Resonant bending-mode response

Theoretical investigation of magnetoelectric surface acoustic wave characteristics of ZnO/Metglas layered composite

Magneto-electric interactions at bending resonance in an asymmetric multiferroic composite: Theory and experiment on the influence of electrode position

Contact Info

Product

Resources

About