MEMS magneto-mechanical microvalves (MMMS) for aerodynamic active flow control

Pernod, Philippe; Preobrazhensky, V.; Merlen, Alain; Ducloux, O.; Talbi, Abdelkrim; Gimeno, L.; Viard, R.; Tiercelin, Nicolas

doi:10.1016/j.jmmm.2009.04.086

Cited by 30 publications

(16 citation statements)

References 17 publications

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“…Their potential applications on miniaturized products, weapons, coatings, communication devices, and for printed circuit boards, among other applications [2][3][4] make this alloy of industrial importance.…”

Section: Introductionmentioning

confidence: 99%

Co100−xFex magnetic thick films prepared by electrodeposition

Aguirre

Farias

Abraham

et al. 2015

Journal of Alloys and Compounds

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Section: Introductionmentioning

confidence: 99%

Co100−xFex magnetic thick films prepared by electrodeposition

Aguirre

Farias

Abraham

et al. 2015

Journal of Alloys and Compounds

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“…However, there are several approaches being pursued academically to bridge the gap between traditional and microfluidics. Two methods presented in the literature include the use of magnetics for valve actuation [17,18]. Fu et al present a solution designed to use 3 mm diameter iron balls to facilitate closure of the valve orifice [17].…”

Section: Motivation and Related Workmentioning

confidence: 99%

“…This design is promising but has too large of a footprint and operates at too low of pressures for use in this application. Another solution presented by Pernod et al has a similar pressure capacity and is operated by a 1 mm long by 3 mm diameter permanent magnet combined with a 500 winding coil to manipulate the valve membrane [18]. This valve has a smaller footprint than the design presented by Fu et al but does not yet meet the requirements for this application in terms of size and controllability.…”

Section: Motivation and Related Workmentioning

confidence: 99%

A Novel 3D Ring-Based Flapper Valve for Soft Robotic Applications

Low¹,

Berg²,

Li³

2017

Preprint

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This paper describes the design and testing of a novel hydraulic control valve for use in the minimally invasive surgical robotic manipulator. The use of hydraulics for surgical robotics opens new possibilities for miniaturization and robustness. However, to enable this, there exists a need for hydraulic components which bridge the size gap between traditional fluidics and microfluidics. This paper provides motivation for the development of a miniature hydraulic valve designed specifically to enable a serpentine style hydraulic surgical manipulator. Included are a description of the various considerations relevant to the valve and its specific application, such as the method of manipulation for the valve, as well as a theoretical valve design and a mathematical description of the operating principles. Two possible methods of valve activation, piezoelectric and electromagnetic, are discussed along with two physical realizations of the valve design are presented which demonstrate the theoretical design. Finally, the results of experimental testing performed on valve prototypes is described to evaluate the design options and help inform the selection of the final configuration.

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“…Among the various microsystems that can be used to do active fluid control, MEMS [1] are an interesting solution due to their properties: small size, low power consumption, cost and real-time control. In fact, with this technology, a fluid flow is controlled by continuously adjusting MEMS actuators based on some information given by MEMS sensors.…”

Section: Introductionmentioning

confidence: 99%

Suitability of Artificial Neural Network for MEMS-based Flow Control

Couchot

Deschinkel

Salomon

2012

2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS

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These last years several research works have studied the application of Micro-Electro-Mechanical Systems (MEMS) for aerodynamical active flow control. Controlling such MEMSbased systems remains a challenge. Among the several existing control approaches for time varying systems, many of them use a process model representing the dynamic behavior of the process to be controlled. The purpose of this paper is to study the suitability of an artificial neural network first to predict the flow evolution induced by MEMS, and next to optimize the flow w.r.t a numerical criterion.

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MEMS magneto-mechanical microvalves (MMMS) for aerodynamic active flow control

Cited by 30 publications

References 17 publications

Co100−xFex magnetic thick films prepared by electrodeposition

Co100−xFex magnetic thick films prepared by electrodeposition

A Novel 3D Ring-Based Flapper Valve for Soft Robotic Applications

Suitability of Artificial Neural Network for MEMS-based Flow Control

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