2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2015
DOI: 10.1109/asmc.2015.7164419
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MEMS manufacturing solutions

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“…With such mass production, comes reduced cost. MEMS is now a mature industry where a lot of the research has been done in the area of the engineering process [41], cofabricating sensors with electronics (CMOS-MEMS) [42], reducing production time [43], improving yields [44] and developing new manufacturing technologies [45].…”
Section: Smart Sensorsmentioning
confidence: 99%
“…With such mass production, comes reduced cost. MEMS is now a mature industry where a lot of the research has been done in the area of the engineering process [41], cofabricating sensors with electronics (CMOS-MEMS) [42], reducing production time [43], improving yields [44] and developing new manufacturing technologies [45].…”
Section: Smart Sensorsmentioning
confidence: 99%