MEMS: micro technology, mega impact

Nanomechanical properties of nanocrystalline Ni–Fe mold insert

“…Recently MEMS technology has been successfully applied to the fabrication of many tips such as microsensor, microgears, microactuators [1][2][3]. The LIGA (or LIGA-like) process which contains lithography, electroforming, and molding is one of the most important microfabrication technologies to fabricate high aspect ratio 3D microstructures.…”

FEA in Micro-Electro-Mechanical Systems (MEMS) Applications: A Micromachined Spatial Light Modulator (μSLM)

“…Since the Nobel Prize winner, Richard Feynman gave the presentation "there is plenty of room at the bottom" [1], a variety of micromachined sensors, actuators, and systems have emerged and made encouraging progress in the past 50 years, based on technological innovations and increased market demand [2]. To date, Micro-Electro-Mechanical Systems (MEMS) have been developed into an interdisciplinary subject which involves electrical, mechanical, thermal, optical, and biological knowledge.…”

Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique

“…Precise systems such as microelectromechanical systems (MEMS) and micro-optical devices incorporate assemblies of microparts having a size on the order of a few to a few hundred micrometers [1], and tolerances of geometric dimensions of the individual microparts must be controlled to an accuracy of less than sub-micrometer order. While measurement techniques such as scanning probe microscopy (SPM) and interferometry are currently used to acquire dimensional characteristics of engineered microsurfaces [2], methods for in situ or in-process measurement is increasingly required in the microparts industry.…”