MEMS Microgripper Actuators and Sensors: The State-of-the-Art Survey

Jia, Yukun; Xu, Qingsong

doi:10.2174/2212797611306020005

Cited by 58 publications

(34 citation statements)

References 69 publications

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“…[ 1,2 ] They represent a very versatile tool that might be used for handling fragile objects from millimeter to micron size. [ 3,4 ] Noncontact manipulation can be achieved by electrostatic actuators evolved from tip-like actuators [ 5 ] to cilia-inspired structures. [ 6 ] The use of magnetic fi elds represents an elegant solution for the contact-less manipulation of magnetic microobjects.…”

mentioning

confidence: 99%

Self-Assembly of Micromachining Systems Powered by Janus Micromotors

Maggi

Simmchen

Saglimbeni

et al. 2015

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Janus particles can self-assemble around microfabricated gears in reproducible configurations with a high degree of spatial and orientational order. The final configuration maximizes the torque applied on the rotor leading to a unidirectional and steady rotating motion. The interplay between geometry and dynamical behavior leads to the self-assembly of Janus micromotors starting from randomly distributed particles.

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confidence: 99%

Self-Assembly of Micromachining Systems Powered by Janus Micromotors

Maggi

Simmchen

Saglimbeni

et al. 2015

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“…In general, due to its bulky size and difficulty in fabrication, EMA is considered if a relative large stroke (in the millimeter or centimeter scale) is required [25,26]. …”

Section: Electromagnetic Actuatormentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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“…In practice, before the microgripper is used for the first time, it needs to be calibrated by the aforementioned method to find the factor (6). Then, the real-time position and force signal can be provided by the capacitive sensor in the free and contact phases, alternately.…”

Section: Design Of Sensormentioning

confidence: 99%

“…The review of recent developments on MEMS microgrippers can be found in [6]. In particular, a microgripper driven by an electrostatic actuator was present in [7].…”

Section: Introductionmentioning

confidence: 99%

A Dual-Axis Electrostatically Driven MEMS Microgripper

Jia

2014

International Journal of Advanced Robotic Systems

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This paper presents the design of a new monolithic twoaxis electrostatically actuated MEMS microgripper with integrated capacitive position and force sensors working at the micro-scale level. Each of the two jaws of the microgripper possesses two degrees-of-freedom (DOF) and is capable of positioning in both x-and y-axes. Unlike existing works, where one gripper arm is actuated and other one is sensed, both arms of the proposed microgripper are actuated and sensed independently. A sensing scheme is constructed to provide the position and force signals in the noncontact and contact phases, respectively. By applying a 120V driving voltage, the jaw can provide 70 μm x-axis and 18 μm y-axis displacements with the force of 190 μN. By this design, the real-time position and grasping force information can be obtained in the dual sensing mode. Both analytical calculation and finite-element analysis (FEA) were performed to verify the performance of the proposed design. A scaled-up prototype is designed, fabricated and tested through the experiment to verify the structure design of the microgripper.

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MEMS Microgripper Actuators and Sensors: The State-of-the-Art Survey

Cited by 58 publications

References 69 publications

Self-Assembly of Micromachining Systems Powered by Janus Micromotors

Self-Assembly of Micromachining Systems Powered by Janus Micromotors

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

A Dual-Axis Electrostatically Driven MEMS Microgripper

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