2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) 2020
DOI: 10.1109/mems46641.2020.9056400
|View full text |Cite
|
Sign up to set email alerts
|

MEMS Micromixer for Ultra Fast Mixing of Fluids

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2023
2023
2023
2023

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
(1 citation statement)
references
References 23 publications
0
1
0
Order By: Relevance
“…The development of the microfluidic systems components is associated with the microtechnology based on silicon materials. They were developed after the discovery of deep etching and bonding methods [1], [2], which allow to realize microchannels in silicon [3], [4], glass [5], [6], polymer material polydimethylsiloxane (PDMS) [7], [8] and SU-8 [9].…”
Section: Introductionmentioning
confidence: 99%
“…The development of the microfluidic systems components is associated with the microtechnology based on silicon materials. They were developed after the discovery of deep etching and bonding methods [1], [2], which allow to realize microchannels in silicon [3], [4], glass [5], [6], polymer material polydimethylsiloxane (PDMS) [7], [8] and SU-8 [9].…”
Section: Introductionmentioning
confidence: 99%