MEMS Mirror for Low Cost Laser Scanners

Hofmann, Ulrich; Janes, Joachim

doi:10.1007/978-3-642-21381-6_16

“…These micromirrors have already been successfully developed and used in various other applications such as display, communication, biomedical devices, etc. [27] [28] [29] [30] [31] [32] and they have already demonstrated their small size and low-cost potential. However most of the existing micromirrors are not suitable for laser marking/engraving applications due to their low aperture flatness, e.g., ROC (Radius of Curvature) ranging from centimeters ~ less than 1 meter, while high mirror plate flatness (ROC >10 meters) is required for laser marking/engraving application in order to completely reflect the incident radiation without any loss as heat [33] [34].…”

Section: Mems Micromirrorsmentioning

confidence: 99%

FPCB magnetic micromirror for laser marking/engraving systems

Periyasamy¹

2022

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<p>The thesis presents the design and development of a novel, rotational micro mirror using Flexible Printed Circuit Boards (FPCB) for the applications in laser marking/engraving system. The use of the new material helps in reducing the overall cost of the laser scanning system when compared to other MEMS based scanners but with higher mirror surface quality. The device mainly caters to applications that require low powered laser (<1watt), small working area (< 20x20mm) and slow scanning speed (2 mm/sec). The scanner consists of two orthogonally positioned quasi static micromirrors which are driven by magnetic lorentz force. Based on the developed laser scanner, a complete laser marking/engraving system was developed which is capable of engraving materials such as leather, TPU smartphone cases, etc. Further, the thesis also addresses a new problem (drifting) associated with the polyimide material used as the substrate for FPCB actuators and a modified vector scanning methodology is proposed to overcome it.</p>

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“…These micromirrors have already been successfully developed and used in various other applications such as display, communication, biomedical devices, etc. [27] [28] [29] [30] [31] [32] and they have already demonstrated their small size and low-cost potential. However most of the existing micromirrors are not suitable for laser marking/engraving applications due to their low aperture flatness, e.g., ROC (Radius of Curvature) ranging from centimeters ~ less than 1 meter, while high mirror plate flatness (ROC >10 meters) is required for laser marking/engraving application in order to completely reflect the incident radiation without any loss as heat [33] [34].…”

Section: Mems Micromirrorsmentioning

confidence: 99%

FPCB magnetic micromirror for laser marking/engraving systems

Periyasamy¹

2022

Preprint

0

View full text Add to dashboard Cite

<p>The thesis presents the design and development of a novel, rotational micro mirror using Flexible Printed Circuit Boards (FPCB) for the applications in laser marking/engraving system. The use of the new material helps in reducing the overall cost of the laser scanning system when compared to other MEMS based scanners but with higher mirror surface quality. The device mainly caters to applications that require low powered laser (<1watt), small working area (< 20x20mm) and slow scanning speed (2 mm/sec). The scanner consists of two orthogonally positioned quasi static micromirrors which are driven by magnetic lorentz force. Based on the developed laser scanner, a complete laser marking/engraving system was developed which is capable of engraving materials such as leather, TPU smartphone cases, etc. Further, the thesis also addresses a new problem (drifting) associated with the polyimide material used as the substrate for FPCB actuators and a modified vector scanning methodology is proposed to overcome it.</p>

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“…[17][18][19]. For eliminating the loss of heat of laser and full reflection of incident beam, mirror plate with high flatness is required [20][21][22]. The quality of micromirror depends on its fabrication process.…”

Section: Mems Micromirrormentioning

confidence: 99%

2D electromagnetic actuated quasi-static FPCB based micromirror for laser marking/engraving system

Kakkar¹

2021

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0

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This thesis presents the design and development of quasi-static 2-dimensional Flexible Printed Circuit Board (FPCB) based micromirror for portable laser marking/ engraving system. It focuses on the modelling and prototyping of the novel 2-dimensional electromagnetic actuated micromirror which can be used in place of two 1-dimensional micromirrors having the benefits of lower footprint in size of the scanner and efficient alignment with the incident laser beam. This 2-dimensional micromirror can be used in portable low power laser marking/ engraving system ideally designed for consumer applications like printing name cards, engraving jewellery etc. The problem of drifting/ creep associated with quasi-static mode of FPCB based micromirror actuators is analyzed and Zero method is proposed to minimize the drifting issue which is proven experimentally in the thesis. From this thesis work, it is evident that the developed 2-dimensional, low-cost, quasi-static FPCB based micromirror would be a suitable candidate for replacement of the expensive conventional MEMS bonded mirrors in the market.

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MEMS Mirror for Low Cost Laser Scanners

Cited by 8 publications

References 4 publications

FPCB magnetic micromirror for laser marking/engraving systems

FPCB magnetic micromirror for laser marking/engraving systems

FPCB magnetic micromirror for laser marking/engraving systems

2D electromagnetic actuated quasi-static FPCB based micromirror for laser marking/engraving system

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